Specific Process Knowledge/Etch/Etching of Aluminium: Difference between revisions

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==Etching of Aluminium==
==Etching of Aluminium==
Write a short description of the process and how to perform the process.
*[[/Deposition of silicon nitride using LPCVD|Process description using methode 1]]
<!-- Link to the process info page in LabAdviser -->
*[[/Deposition of silicon nitride using LPCVD|Process description using methode 2]]
<!-- Link to the process info page in LabAvdiser -->
<br clear="all" />
==Comparison methode 1 and methode 2 for the process==
{|border="1" cellspacing="1" cellpadding="3" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!
![[Specific Process Knowledge/Thin film deposition/Furnace LPCVD Nitride|Methode 1]]
![[Specific Process Knowledge/Thin film deposition/PECVD|Methode 2]]
|-
|-
|-style="background:WhiteSmoke; color:black"
!Generel description
|Generel description - methode 1
|Generel description - methode 2
|-
|-
|-style="background:LightGrey; color:black"
!Parameter 1
|
*A
*B
|
*A
*B
|-
|-
|-style="background:WhiteSmoke; color:black"
!Parameter 2
|
*A
*B
*C
|
*A
|-
|-
|-style="background:LightGrey; color:black"
!Substrate size
|
*<nowiki>#</nowiki> small samples
*<nowiki>#</nowiki> 50 mm wafers
*<nowiki>#</nowiki> 100 mm wafers
*<nowiki>#</nowiki> 150 mm wafers
|
*<nowiki>#</nowiki> small samples
*<nowiki>#</nowiki> 50 mm wafers
*<nowiki>#</nowiki> 100 mm wafers
*<nowiki>#</nowiki> 150 mm wafers
|-
|-
|-style="background:WhiteSmoke; color:black"
!'''Allowed materials'''
|
*Allowed material 1
*Allowed material 2
|
*Allowed material 1
*Allowed material 2
*Allowed material 3
|-
|}

Revision as of 10:43, 12 March 2013

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Etching of Aluminium

Write a short description of the process and how to perform the process.


Comparison methode 1 and methode 2 for the process

Methode 1 Methode 2
Generel description Generel description - methode 1 Generel description - methode 2
Parameter 1
  • A
  • B
  • A
  • B
Parameter 2
  • A
  • B
  • C
  • A
Substrate size
  • # small samples
  • # 50 mm wafers
  • # 100 mm wafers
  • # 150 mm wafers
  • # small samples
  • # 50 mm wafers
  • # 100 mm wafers
  • # 150 mm wafers
Allowed materials
  • Allowed material 1
  • Allowed material 2
  • Allowed material 1
  • Allowed material 2
  • Allowed material 3
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