Specific Process Knowledge/Thermal Process/Resist Pyrolysis Furnace: Difference between revisions

From LabAdviser
Jump to navigation Jump to search
Line 22: Line 22:
{| border="2" cellspacing="0" cellpadding="2"  
{| border="2" cellspacing="0" cellpadding="2"  


!colspan="2" border="none" style="background:silver; color:black;" align="center"|  
!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
|style="background:WhiteSmoke; color:black"|Resist Pyrolysis Furnace
|style="background:WhiteSmoke; color:black"|<b>Resist Pyrolysis Furnace</b>
|-
|-
!style="background:silver; color:black;" align="center"|Purpose  
!style="background:silver; color:black;" align="center"|Purpose  

Revision as of 16:14, 30 November 2012

Resist Pyrolysis Furnace

The Resist Pyrolysis Furnace is used for resist pyrolysis, where samples with different resist layers are heated up to maximum 1000oC in a nitrogen atmosphere. At high temperatures carbon is formed by pyrolysis of the resist. In this way conductive structures can be made from a resist patterned sample.

If oxygen from the air or from outgassing of the resist is present in the furnace, the resist layer will be removed. Thus, for each process it is important to include a step with a high nitrogen flow at a lower temperature, before a high temperature for resist pyrolysis is obtained. Pyrolysis of a large amount of resist may also be a problem due to resist outgassing.

During processing the furnace is rapidly heated by use of six long heating lamps situated around the furnace tube, andt cooling is done (rather slowly) by use of cooling fans. The furnace is purged with a controlable nitrogen flow. There is no vacuum on the furnace.

The user manual, user APV, technical information and contact information can be found in LabManager:

The Resist Pyrolysis furnace. Located in the III-V Lab

Resist Pyrolysis Furnace

Process information

There are no standard processes on the furnace.

Equipment performance and process related parameters

Equipment Resist Pyrolysis Furnace
Purpose
  • Pyrolysis of different resist layers to form conductive structures
Process parameter range Temperature
  • 0-1000oC
  • Temperature ramp-up rate: Max 10oC/min
  • Temperature ramp-down rate: Relative slow (depending on the furnace temperature)
Nitrogen flows
  • Flow 1: Max 660 liter/hour
  • Flow 2: Max 3500 liter/hour
Substrates Batch size
  • Several small samples (placed on Si support wafers)
  • One-six 50 mm wafers (placed on Si support wafers)
  • One-six 100 mm wafers
Allowed materials
  • Silicon
  • Silicon oxide
  • Silicon nitride
  • Quartz
  • AZ resist (prebaked)
  • SU-8 (prebaked)