May 2011 Survey

Survey introduction

The May 2011 survey was the fifth survey carried out using a format where individual cleanroom users were asked about their view on various parts of using DTU Danchip's facilities and in particular the cleanroom facilities.
The questionaire was send to 198 registered users (based on the logging of cleanroom use) unfortunately 5 of the e-mail adresses was obsolete and thus the mails bounced, which brought the total number of potential answers to 193. In total 30 persons answered the questionaire which means an answer fraction of 15% regardless of whether or not the bounces should be included in the total.
This page deals with the comments given as part of the questionaire. Danchip values this feedback highly.

Comments

The comments appear here as they were written in the feedback field of the questionaire. In a few cases they have been anonymized or the worst spelling mistakes corrected.

Comment 1

It seems that the DRIE-pegasus suffers some serious load/unload issues. If these cannot be fixed it might be an idea to train a few 'super-users' in how to open the chamber, unload the wafers and clean the chuck manually. As it is now, if the machine goes 'out of use' in the afternoon it is not up and running until next morning.

Action: Pegasus is still under warranty. SPTS is due to come week 29 to fix the problem and perform "stress test" of the system
After the SPTS-visit we evaluate the situation again. Our normal policy is that users should not have access/permission to deal with these parts of the machines.

Comment 2

I am not satisfied only with the long queue for the EBL. This would be great if there is one more Electron Beam Lithography machine at Danchip.

Action:

Comment 3

Not satisfied with the new training structure - it simply takes too long to be given training when you only have a few month for the project you are doing! Several times we have waited for weeks to get training. I think it would help a bit if you were told when your training vould start, but you are just told that you are on a list. I know the teachers are busy, but at least tell us when we can expect training in time not number on the list. But still the most anoying is that you have to wait for more than one ot two weeks. However i would like to note that when a person is helping you they are very helpful and there is no problem there.

Action: New central hub for training requests, more instructors for next spring.
We are sorry about the inconvenience you have had. Danchip has not been happy about the situation either. So what we have done is implement a central hub for training requests (Training@danchip.dtu.dk) and within 24 hours of receiving the wish for training we aim to provide a start date for the training. Furthermore we are looking into ways in which we can utilize more instructors next spring when a new big inrush of students is expected.

Comment 4

Failure reporting protocol could be made more strict and/or exhaustive ; equipment could be made to automatically report failure details to a central repository for more efficient analysis and solution. Great working environment.

Action: We aim to explain clearly when equipment is put out of use. In regards to a central repository this is not an easy task as equipment controlling software typically is closed source and typically has limited data export features.

Comment 5

The status "limited use" should be better used for cases where equipment is not fully operational.Better control of chemicals is required (expire dates, regular replacements). Control limits for equipment and reaction plans for deviation are not always clear and well defined. For some tools there are no control procedures yet although the tools are operational for long time now (SSE spinner, Pegasus).Control and regular adjustment of back side alignment on the KS aligner is missing. We hope humidity control in RR3 is now improved. Last year it was impossible to run lithography during summer time.

Action:
Thank you for this feedback on actions we still haven't finished. We are in the process of revising control instructions in terms of scope, status and reaction plans. We have spent ~0.5 Mkr on the air preparation system in the old cleanroom since last summer, so humidity control should be much better this year.

Comment 6

Der går nogen gange ret lang tid fra man har sendt en mail til training@danchip.dtu.dk til man får et svar. Det ville være rart med et auto-svar, bare så man ved, at ens mail ikke er forsvundet ud i den blå luft.

Action: Focus on giving personal response within 24 hours
You might have been unlucky or sent your request while training@danchip.dtu.dk was not fully operational. We have deliberately choosen not to provide an autoreply but instead answer personally, but we aim at answering your mail and provide you with a start date within 24 hours.

Comment 7

Performance of equipment: I have put the rate at satisfied, but it is on the borderline of being unsatisfied. Lately I think there is several pieces of equipment that have been failing, although mostly for short periods. Would it not be possible to have more rigoriously maintenance, thereby preventing some of the downperiods?

Action: Follow up on specific equipment
We strive to keep tools operational and available to users of the cleanroom. There are several issues which needs balancing: time used on repair vs. time used on maintenance, tool out of use due to service vs. availability of tool, and of course the everpresent ressource constraints. Danchip is continuosly aiming at improving our performance.

Comment 8

I always feel that the cleanroom is operating very well. When a machine breaks down or there is maintenance Danchip is quick to inform once they have an estimate. The staff is always pleasant and helpful. Furthermore the Danchip staff excel meeting a challenge. You come to them with some wild ideas or requirements and they will do their very best to assist you in defining this in a cleanroom procedure.

Action: No action
Thank you very much, positive feedback is highly appreciated.

Comment 9

Many pieces of equipment have been out of use extensively and others are performing far from an acceptable spec.

Action: Follow up on specific equipment
We have some very popular tools which also have some performance issues (in particular: Track1, Pegasus and EVG NIL). We are trying to solve the problems with these tools. For Track 1 we are working hard to keep it operational while looking for a replacement. The cooling on the EVG NIL has been a sore thumb for a while and we are putting more ressources into solving this later in the summer. The Pegasus has some handling issues which appear we are working closely with SPTS to solve. We care about our tools and wants them operational as much as possible, but some problems are really hard to solve.

Comment 10

Nogle gange er begge bageplader på SSE spinneren efterladt ved en høj temperatur, så man skal vente op til 45 min på at kunne spinne almindelig AZ resist. Hvorfor er det begge bageplader der varmes op til 180C under nogle processer? Kan man ikke lave den ene bageplade dedikeret til 90/100C til AZ resist?

Action:

Comment 11

It took far too long for me to start training on any machine. After my training started I had no problems getting time with the staff but before this it was impossible to accomplish anything...therefore I would suggest to put more people in charge of customer service / training in order to speed up the 3 weeks from initial contact to the start if my training.

Action: Central hub for training and more instructors
We are sorry that you have had such a long delay before starting. What we have implemented is a new central point for training (Training@danchip.dtu.dk) and next spring we allocate more people for training. We are not happy about the long delays that some of our users have experienced and will do our utmost to make sure this doesn't happen again.

Comment 12

Det er lidt kritisk med ventetiden for at få oplæring for dem der har projekter som skal afsluttes. Nu har det ikke været noget problem for mig da der har været andre ting at lave, men for andre kan jeg godt forestille mig det ikke er godt nok.

Action: Central hub for training and more instructors
Training delays for some students have been too long this spring and it is a focus area of Danchip to make sure this does not happen again.