Specific Process Knowledge/Etch/DRIE-Pegasus/processD: Difference between revisions

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{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
{| border="2" cellpadding="2" cellspacing="1" style="text-align:center;"
|+ '''Process A recipe'''
|+ '''Process D recipe'''
|-
|-
!
! colspan="2" | Step 1
! colspan="2" | Step 2
|-
|-
! width="120" | Parameter  
! width="120" | Main etch (D->E)  
! width="120" | Etch
! width="120" | Dep
! width="120" | Etch
! width="120" | Etch
! width="120" | Dep
! width="120" | Dep
|-
|-
! Gas flow (sccm)  
! Gas flow (sccm)  
| SF<sub>6</sub> 350 (1.5 s) 550
| SF<sub>6</sub> 275 O<sub>2</sub> 5
| C<sub>4</sub>F<sub>8</sub> 200
| C<sub>4</sub>F<sub>8</sub> 150
| SF<sub>6</sub> 350 (1.5 s) 550
| C<sub>4</sub>F<sub>8</sub> 200
|-
|-
! Cycle time (secs)  
! Cycle time (secs)  
| 7.0
| 2.4
| 4.0
| 2.0
| 7.0
| 4.0
|-
|-
! Pressure (mtorr)  
! Pressure (mtorr)  
| 25 (1.5 s) 90 >> 150
| 26
| 25
| 20
| 25 (1.5 s) 150
| 25
|-
|-
! Coil power (W)  
! Coil power (W)  
| 2800
| 2500
| 2000
| 2800
| 2000
| 2000
|-
|-
! Platen power (W)
! Platen power (W)
| 120 >> 140 (1.5) 45
| 35
| 0
| 0
| 140 (1.5) 45
| 0
|-
|-
! Cycles   
! Cycles   
| colspan="2" | 11 (keep fixed)
| colspan="2" | 110 (process time 08:04)
| colspan="2" | 44 (vary this)
|-
|-
! Common  
! Common  
| colspan="4" | Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers
| colspan="2" | Temperature 0 degs, HBC 10 torr, Long funnel, with baffle & 100 mm spacers
|}
|}

Revision as of 12:56, 5 July 2011

Process A specifications
Parameter Specification Average result
Etch rate (µm/min) > 15 18.9
Etched depth (µm) 150 189.1
Scallop size (nm) < 800 718
Profile (degs) 91 +/- 1 91.1
Selectivity to AZ photoresist > 150 310
Undercut (µm) <1.5 0.84
Uniformity (%) < 3.5 3.0
Repeatability (%) <4 0.43



Process D recipe
Main etch (D->E) Etch Dep
Gas flow (sccm) SF6 275 O2 5 C4F8 150
Cycle time (secs) 2.4 2.0
Pressure (mtorr) 26 20
Coil power (W) 2500 2000
Platen power (W) 35 0
Cycles 110 (process time 08:04)
Common Temperature 0 degs, HBC 10 torr, Long funnel, with baffle & 100 mm spacers
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