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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Thin_Film click here]'''  
''The contents on this page, including all images and pictures, was created by DTU Nanolab staff unless otherwise stated.''


''This page is written by DTU Nanolab internal''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Thin_Film click here]'''


==Thin Film TPT ==
== Thin Film Tool Package Training ==


DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.  
DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].  
 
<BR>
Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).  
<BR>
 
The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/thin-film-training here].
{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
<BR>
|-
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'''Course Layout'''
|-
# Online lecture videos (theory)
|-style="background:White; color:black; text-align:center"
# Quizzes for each section
!colspan="2"|Thin film tool package training (TPT)
# Individual hands-on training (specific equipment)
|-
<BR>
 
''Individual ands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''
|-
<BR>
!Schedule
<BR>
|
'''Learning objectives''' 
===<b>Theoretical part</b>===
<BR>
 
* Understand different film deposition methods
 
* Learn different thin film formation mechanisms
'''1<sup>st</sup> lecture (2 - 2½ hours):'''
* be aware of relevant materials properties
*Introduction to thin films
* compare and be able to understand appropriate thin film techniques
*Before you start - Material properties to consider
* introduction to equipment at DTU Nanolab
*Overview of thin film techniques at DTU Nanolab
<BR>
*Equipment overview in LabAdviser
'''Course Contents'''
*Thin film techniques – 1<sup>st</sup> part:
<BR>
**Thermal oxidation
* Introduction to Thin Film Techniques
 
** ''Thin Film Formation''
<i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e.
** ''Material Properties''
 
** ''Overview over Thin Film Techniques''
The next lecture will be held on the 13th of June 2023 from 10:00 to 12:00.
* Physical Vapour Deposition (PVD)
 
** ''Introduction to PVD''
No lecture will be held in July.
** ''Resistive thermal evaporation''
 
** ''E-beam Evaporation''
A date for a lecture in August has not been decided yet. If you want to attend the Thin Film TPT course this month, then send an email to thinfilm@nanolab.dtu.dk and let us know, when you are available. 
** ''Sputtering''
 
* Thermal Oxidation
Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
* Chemical Vapor Deposition (CVD)
 
* Atomic Layer Deposition (ALD)
<!--The next lecture will be held on the 14th of June 2022 from 10:00 to 12:30.-->  
<BR>
 
'''Qualifying Prerequisites'''
<!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.-->
<BR>
 
* Cleanroom safety course at DTU Nanolab
'''2<sup>nd</sup> lecture (3 - 3½ hours):'''
* Admission to the cleanroom must be obtained before the group training session
*Thin film techniques – 2<sup>nd</sup>  part:
<BR>
**PVD (physical vapour deposition)
'''Course Responsible'''
***E-beam evaporation
* Pernille Voss Larsen
***Thermal evaporation
* Evgeniy Shkondin
***Sputtering
<BR>
**CVD (chemical vapour depostion)
If you have questions you can contact us via [mailto:thinfilm@nanolab.dtu.dk thinfilm@nanolab.dtu.dk].
***LPCVD (low pressure chemical vapour deposition)
***PECVD (plasma enhanced chemical vapour deposition)
**ALD (atomic layer deposition)
 
<i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf
 
The next lecture will be held on the 15th of June from 9:00 to 12:00.
 
No lecture will be held in July.
 
A date for a lecture in August has not been decided yet. If you want to attend the Thin Film TPT course this month, then send an email to thinfilm@nanolab.dtu.dk and let us know, when you are available.
 
Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
 
<!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.-->
 
===<b>Practical part</b>===
* None
|-
 
|-
!Location
|
'''Theoretical part'''
* The location of the lectures will be notified in the doodles
 
|-
 
|-
!Qualified prerequisites
|
* None
|-
 
|-
!Preparations
|
* Read [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes] (Available online from DTU campus).
|-
 
|-
!Course responsible
|
*The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
|-
 
|-
!Learning goals
|
*Be aware of relevant material properties for thin films made in the cleanroom
*Understand different thin film techniques
*Compare and be able to select appropriate thin film technique
 
|-
|}
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<br clear="all" />
<BR>


===Material for preparations and further information===
==Knowledge and Information about Thin Film Techniques==
 
 
 
 
====Slides from the lectures====
 
<big>Slides from lecture 1</big>
*Lecture slide show [[Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx]]
 
<big>Slides from lecture 2</big>
*Lecture slide show [[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]
 
 
<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]
 
====Literature====
 
Some litterature can be found in the LabManager (required a login):
 
* S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
* S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
* M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties
* K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Film
 


====Introduction to Thin Films====
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films]
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*[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf  K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films]
*[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf  K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films]


======Thermal Oxidation======
====Thermal oxidation====
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]


======Stress in Thin Films======
====Stress in Thin Films====
*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]
*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]
*[https://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/StylusProfilometry/ApplicationNotes/AN516-Thin_Film_Stress_Measurement_Using_Dektak_Stylus_P.pdf Dektak stress measurements]
*[https://www.bruker.com/en/meta/fileadmin/_jcr_content/root/contentpar/search.download-asset.pdf/2bbdadb5-98f9-4b72-9ad4-cfb3683fb2da/thin-film-stress-measurement-using-dektak-stylus-profilers-app-note-BRUKER.pdf Dektak stress measurements]
<br clear="all" />
<BR>

Latest revision as of 20:54, 24 February 2025

The contents on this page, including all images and pictures, was created by DTU Nanolab staff unless otherwise stated.

Feedback to this page: click here

Thin Film Tool Package Training

DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.

The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.

Course Layout

  1. Online lecture videos (theory)
  2. Quizzes for each section
  3. Individual hands-on training (specific equipment)


Individual ands on training can be requested via training@nanolab.dtu.dk.

Learning objectives

  • Understand different film deposition methods
  • Learn different thin film formation mechanisms
  • be aware of relevant materials properties
  • compare and be able to understand appropriate thin film techniques
  • introduction to equipment at DTU Nanolab


Course Contents

  • Introduction to Thin Film Techniques
    • Thin Film Formation
    • Material Properties
    • Overview over Thin Film Techniques
  • Physical Vapour Deposition (PVD)
    • Introduction to PVD
    • Resistive thermal evaporation
    • E-beam Evaporation
    • Sputtering
  • Thermal Oxidation
  • Chemical Vapor Deposition (CVD)
  • Atomic Layer Deposition (ALD)


Qualifying Prerequisites

  • Cleanroom safety course at DTU Nanolab
  • Admission to the cleanroom must be obtained before the group training session


Course Responsible

  • Pernille Voss Larsen
  • Evgeniy Shkondin


If you have questions you can contact us via thinfilm@nanolab.dtu.dk.

Knowledge and Information about Thin Film Techniques

Introduction to Thin Films

Thermal oxidation

Stress in Thin Films



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