LabAdviser/Courses/TPT Thin Film: Difference between revisions
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===<b>Theoretical part</b>=== | ===<b>Theoretical part</b>=== | ||
<br> | |||
'''1<sup>st</sup> lecture (2 - 2½ hours):''' | |||
*Introduction to thin films | |||
**Thin film formation | |||
**Material properties | |||
**Overview of the techniques | |||
**LabAdviser | |||
*PVD (physical Vapour Deposition) | |||
**General notes on PVD | |||
**Resistive thermal evaporation | |||
**E-beam Evaporation | |||
**Sputtering | |||
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*Introduction to thin films | *Introduction to thin films | ||
*Before you start - Material properties to consider | *Before you start - Material properties to consider | ||
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*Equipment overview in LabAdviser | *Equipment overview in LabAdviser | ||
*Thin film techniques – 1<sup>st</sup> part: | *Thin film techniques – 1<sup>st</sup> part: | ||
**Thermal oxidation | **Thermal oxidation | ||
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<i> | <i> | ||
The next lecture will be held on the 17th of April 2024 from 10-12 The lecture will be held in room 011 in building 451. | |||
Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079. | |||
In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”. | |||
You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture. | |||
Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i> | Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i> | ||
<!-- | <!--https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e. | ||
If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk.--> | |||
<!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.--> | <!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.--> | ||
'''2<sup>nd</sup> lecture (3 - 3½ hours):''' | '''2<sup>nd</sup> lecture (3 - 3½ hours):''' | ||
*Thermal Oxidation | |||
*CVD (Chemical Vapour Deposition): | |||
**LPCVD (Low Pressure Chemical Vapour Deposition) | |||
**PECVD (Plasma Enhanced Chemical Vapour Deposition) | |||
*ALD (Atomic Layer Deposition) | |||
**Thermal ALD | |||
**Plasma Enhanced ALD | |||
*Comparison of thin film techniques | |||
<!-- | |||
*Thin film techniques – 2<sup>nd</sup> part: | *Thin film techniques – 2<sup>nd</sup> part: | ||
**PVD (physical vapour deposition) | **PVD (physical vapour deposition) | ||
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***PECVD (plasma enhanced chemical vapour deposition) | ***PECVD (plasma enhanced chemical vapour deposition) | ||
**ALD (atomic layer deposition) | **ALD (atomic layer deposition) | ||
--> | |||
<i>The next lecture will be held on the 19th of April 2024 from 9-12. The lecture will be held in room 043 in building 345B. | |||
Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079. | |||
In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”. | |||
You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture. | |||
Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. | |||
Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i> | <!-- Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i> | ||
If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.--> | |||
===<b>Practical part</b>=== | ===<b>Practical part</b>=== | ||
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| | | | ||
'''Theoretical part''' | '''Theoretical part''' | ||
The locations for the lectures will be notified in the Doodles | |||
|- | |- | ||
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!Qualified prerequisites | !Qualified prerequisites | ||
| | | | ||
None | |||
|- | |- | ||
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!Preparations | !Preparations | ||
| | | | ||
No preparation is required. | |||
However, a good overview of thin film processes can be found in [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes] (requires login). | |||
Links to more literature about thin films can be found below. | |||
|- | |- | ||
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!Course responsible | !Course responsible | ||
| | | | ||
The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk) | |||
|- | |- | ||
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<br clear="all" /> | <br clear="all" /> | ||
== | ==Presentations from the lectures== | ||
=== | <big>Slides from the 1<sup>st</sup> lecture</big> | ||
*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f See LabManager (requires a login)] | |||
<!--[[Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx]]--> | |||
<big>Slides from the 2<sup>nd</sup> lecture</big> | |||
*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f See LabManager (requires a login)]. | |||
<!--[[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]--> | |||
==Literature== | |||
Some literature about thin films can be found here (requires a login): | |||
====Introduction to thin films==== | |||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes] | ||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films] | ||
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*[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films] | *[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films] | ||
====Thermal oxidation==== | |||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation] | ||
====Stress in thin films==== | |||
*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects] | *[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects] | ||
*[https://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/StylusProfilometry/ApplicationNotes/AN516-Thin_Film_Stress_Measurement_Using_Dektak_Stylus_P.pdf Dektak stress measurements] | *[https://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/StylusProfilometry/ApplicationNotes/AN516-Thin_Film_Stress_Measurement_Using_Dektak_Stylus_P.pdf Dektak stress measurements] | ||
Latest revision as of 09:35, 5 April 2024
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This page is written by DTU Nanolab internal
Thin Film TPT
DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.
Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).
| Thin film tool package training (TPT) | |
|---|---|
| Schedule |
Theoretical part
1st lecture (2 - 2½ hours):
The next lecture will be held on the 17th of April 2024 from 10-12 The lecture will be held in room 011 in building 451. Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079. In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”. You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture. Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.
2nd lecture (3 - 3½ hours):
The next lecture will be held on the 19th of April 2024 from 9-12. The lecture will be held in room 043 in building 345B. Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079. In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”. You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture. Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.
Practical part
|
| Location |
Theoretical part The locations for the lectures will be notified in the Doodles |
| Qualified prerequisites |
None |
| Preparations |
No preparation is required. However, a good overview of thin film processes can be found in Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes (requires login). Links to more literature about thin films can be found below. |
| Course responsible |
The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk) |
| Learning goals |
|
Presentations from the lectures
Slides from the 1st lecture
Slides from the 2nd lecture
Literature
Some literature about thin films can be found here (requires a login):
Introduction to thin films
- S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
- S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films
- D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties
- K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films