Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/tests CHF3+H2: Difference between revisions
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===Recipes and results - <span style="background:#FFD850">CHF<sub>3</sub> tests=== | ===Recipes and results - <span style="background:#FFD850">CHF<sub>3</sub> tests=== | ||
Tests performed with AZ5214E resist: | =Tests performed with AZ5214E resist:= | ||
{| border="1" cellspacing="1" cellpadding="1" align="left" | {| border="1" cellspacing="1" cellpadding="1" align="left" | ||
! '''Recipe''' | ! '''Recipe''' |
Revision as of 16:42, 5 March 2024
Recipes and results - CHF3 tests
Tests performed with AZ5214E resist: