Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest

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Content and illustration by Thomas Pedersen, DTU Nanolab unless otherwise noted.

Request for user exposure slot

All exposure slots on the JEOL 9500 system are managed and delegated by the Nanolab EBL staff in order to optimize the use of the system. In order to get an exposure slot users must request a slot by submitting a request form AND prepared job files for the exposure. The EBL staff will then assign the user a slot of an appropriate length for the exposure. In this way we ensure that booking slots have the correct length and that no tool time is wasted on file preparation.

It is thus necessary to have a working set of job files before a booking slot is assigned. It is advisable to compile the job files before submitting a request to make sure the job files compile as intended. One can either compile the job on the JEOL 9500 system while another user is exposing or one can compile remotely on the JEOL Compilation Computer through the external Beamer PC. If you need help creating your job files, please request a meeting and we will be happy to help.

When a booking slot is granted it must be used for the intended job and nothing else. Please see usage conditions below.

The request form can be found here. Please send the request to E-beam@nanolab.dtu.dk.

Next day jobs must be submitted before 15.00.

Request form guide

Requests are made per cassette. Hence if you need more than one cassette you will need to submit more than one request form and more than one set of job files. Please fill in the form as explained below.

Date: Date of the request [YYMMDD].

Username: Labmanager username.

Date and time: Suggest one or two vacant slots in the booking calendar. Make sure you can actually have the substrate ready on time.

Cassette and window: Select the slot window(s) you would like to use.

Job files: Job files must either be placed on:

• The Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs", please create a subfolder as [YYMMDD-initials] with the date being the same as put on the request form
• The JEOL 9500 system at /home/eb0/jeoleb/job/1preex/username
• The JEOL Compilation Computer at /home/eb0/jeoleb/job/1PreExposureFiles

Indicate on the form where we can find the files.

SDF filename(s):Name of the SDF file(s).

Prealignment: Please indicate if you need prealignment.

Estimated execution time: Expected execution time. Either from job compilation or based on the Writing Time Estimator Excel sheet.

Usage conditions

• Exposures must start as soon as possible in a given slot. Hence the user must have the substrate(s) mounted (and prealigned if needed) such that the cassette can be loaded immediately when the booking starts.

• If your substrate for some reason can not be ready in time you must notify us on the request email as soon as possible. You can not change your job to something else without approval.

• Minor changes can be made to a job between submission and exposure. These changes may not affect execution time in any significant way. If you need to make significant changes to a job you must notify the EBL staff on the request email address.

• Booking slot assignments are personal. The person requesting the exposure must also carry out the exposure. If there is a sudden need for a colaborating colleague to take over the exposure due to illness or similar you must notify the EBL staff. We must at all times know who is actually running the system.

• Previously there was a limit on the number of future bookings a user could have. There is no such defined limit any longer. We will of course not allow a single user to take up an unreasonable fraction of the time on the tool though.

• Previously there was also a limit on the duration of a single session. Initially we will not impose a strict limit on this but during the request process we will work with the user to find a reasonable duration.

• Long exposures will always be placed at the end of a day to free up day time for shorter exposures.