Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch: Difference between revisions

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=More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch=
=More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch=


Tests performed by MAria Farinha @DTU Nanolab
Tests performed by Maria Farinha @DTU Nanolab

Revision as of 13:49, 3 October 2023

More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch

Tests performed by Maria Farinha @DTU Nanolab