Specific Process Knowledge/Thermal Process/Oxide mask: Difference between revisions
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==Oxide mask thickness== | ==Oxide mask thickness== | ||
A thermal oxide mask can protect areas from diffusion during a pre deposition and drive in process. | A thermal oxide mask can protect areas from diffusion during a pre deposition and drive-in process. It can also be used during a PECVD based diffusion process. The required oxide thickness differs for phosphorous and boron diffusion as the respective diffusion coefficients are different. The figures below indicate the minimum thermal oxide thickness to be used based on temperature and diffusion time. | ||
https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=9&name=Boron-mask.png | |||
https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=9&name=Phosphorous-mask.png | |||
Latest revision as of 10:05, 15 June 2023
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Oxide mask thickness
A thermal oxide mask can protect areas from diffusion during a pre deposition and drive-in process. It can also be used during a PECVD based diffusion process. The required oxide thickness differs for phosphorous and boron diffusion as the respective diffusion coefficients are different. The figures below indicate the minimum thermal oxide thickness to be used based on temperature and diffusion time.
https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=9&name=Boron-mask.png
https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=9&name=Phosphorous-mask.png