Specific Process Knowledge/Characterization/KLA-Tencor Surfscan 6420: Difference between revisions

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''This page is written by DTU Nanolab  internal''
==<span style="color:Red">EXPIRED. The KLA-Tencor Surfscan 6420 has has been removed from the cleanroom in April 2023. It has been replaced with the [[Specific_Process_Knowledge/Characterization/Particle_Scanner_Takano|Particle Scanner Takano]] that can be used instead.</span>==


== KLA-Tencor Surfscan 6420 ==
== KLA-Tencor Surfscan 6420 ==


[[image:Surfscan_at_FAT.JPG|300x300px|right|thumb|The image is from the cleanroom at the place it was refurbish in California.]]
[[image:Surfscan_at_FAT.JPG|300x300px|right|thumb|The KLA-Tencor Surfscan (at the place in California where it was refurbished).]]


Particle counting of an unpatterned surface. A broad range of particles size from 0.1 µm to greater than 3 µm can be measured on a polished silicon or epitaxial layers. Thin films as e.g. Poly-si, Nitride and thermal Oxide can also be inspected. The system will remove small surface roughness so it will not count as particles.  
The KLA-Tencor is a surface analysis instrument for detecting, couting and sizing of particles, i.e. light point defects. A broad range of particles size from 0.15 µm to greater than 3 µm can be measured on a polished silicon surface with or without or epitaxial layers. The particle contamination in thin films like nitride, oxide and polymer or resist layers can also be inspected.  
The system will remove small surface roughness, so it will not count as particle contaminations.  


The system is mainly being used for quality control of the PECVDs and LPCVD nitride furnaces in the cleanroom.


<!--'''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:''' -->
Users will have to contact the responsible persons (the Thin Film group), if they want to make some particle measurements.
<!-- remember to remove the type of documents that are not present -->
 
'''[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=318 Surfscan 6420]'''
 
 
== Process information ==
 
*[[Specific Process Knowledge/Characterization/KLA-Tencor Surfscan 6420/Acceptance test results|Acceptance test results]]


<!-- give the link to the equipment info page in LabManager: -->
<!--[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=18 LabManager]-->


==Overview of the performance of the Surfscan 6420 and some process related parameters==
==Overview of the performance of the Surfscan 6420 and some process related parameters==


{| border="2" cellspacing="0" cellpadding="0"  
{| border="2" cellspacing="0" cellpadding="2"  
|-
|-
!style="background:silver; color:black;" align="center"|Purpose  
!style="background:silver; color:black;" align="center"|Purpose  
Line 22: Line 32:


|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Particles counting
*Detecting, counting and sizing of particles (light point defects)
|-
|-
!style="background:silver; color:black" align="center" rowspan="3"|Performance
!style="background:silver; color:black" align="center" rowspan="3"|Performance
|style="background:LightGrey; color:black"|Particles size
|style="background:LightGrey; color:black"|Particles size
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*0.1 µm to 3 µm
*0.15 µm to > 3 µm
|-
|-
|style="background:LightGrey; color:black"|Througput
|style="background:LightGrey; color:black"|Througput
Line 35: Line 45:
|style="background:LightGrey; color:black"|Repeatbility
|style="background:LightGrey; color:black"|Repeatbility
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Within  1%, 1σ (mean count > 500, 0,204 µm diameter latex spheres)
*Within  1%, 1σ (mean count > 500, 0.204 µm diameter latex spheres)
|-
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range
!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Process parameter range
|style="background:LightGrey; color:black"|Process Temperature
|style="background:LightGrey; color:black"|Process Temperature
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Room temperature
*Room temperature
|-
|style="background:LightGrey; color:black"|Process pressure
|style="background:WhiteSmoke; color:black"|
*1 atm
|-
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Substrates
|style="background:LightGrey; color:black"|Batch size
|style="background:LightGrey; color:black"|Batch size
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Small wafer pieces can all be used
*1-25 100 mm wafers  
*1-25 100 mm wafers  
*1-25 150 mm wafers
*1-25 150 mm wafers
*1-25 200 mm wafers
*1-25 200 mm wafers (the loader has to be changed)
|-
|-
| style="background:LightGrey; color:black"|Substrate material allowed
|style="background:LightGrey; color:black"|Substrate materials allowed
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
 
*Silicon
*Thin layers of oxide, nitride and polymer/resist
|-  
|-  
|}
|}

Latest revision as of 13:58, 13 June 2023

Feedback to this page: click here

This page is written by DTU Nanolab internal

EXPIRED. The KLA-Tencor Surfscan 6420 has has been removed from the cleanroom in April 2023. It has been replaced with the Particle Scanner Takano that can be used instead.

KLA-Tencor Surfscan 6420

The KLA-Tencor Surfscan (at the place in California where it was refurbished).

The KLA-Tencor is a surface analysis instrument for detecting, couting and sizing of particles, i.e. light point defects. A broad range of particles size from 0.15 µm to greater than 3 µm can be measured on a polished silicon surface with or without or epitaxial layers. The particle contamination in thin films like nitride, oxide and polymer or resist layers can also be inspected. The system will remove small surface roughness, so it will not count as particle contaminations.

The system is mainly being used for quality control of the PECVDs and LPCVD nitride furnaces in the cleanroom.

Users will have to contact the responsible persons (the Thin Film group), if they want to make some particle measurements.

Surfscan 6420


Process information


Overview of the performance of the Surfscan 6420 and some process related parameters

Purpose
  • Detecting, counting and sizing of particles (light point defects)
Performance Particles size
  • 0.15 µm to > 3 µm
Througput
  • Up to 100 wafer per hour (200 mm)
Repeatbility
  • Within 1%, 1σ (mean count > 500, 0.204 µm diameter latex spheres)
Process parameter range Process Temperature
  • Room temperature
Substrates Batch size
  • 1-25 100 mm wafers
  • 1-25 150 mm wafers
  • 1-25 200 mm wafers (the loader has to be changed)
Substrate materials allowed
  • Silicon
  • Thin layers of oxide, nitride and polymer/resist
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