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= XPS data processing guide =
<!--Checked for updates on 30/7-2018 - ok/jmli -->
<!--Checked for updates on 5/10-2020 - ok/jmli -->
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Characterization/XPS/Processing/Basics click here]'''


This section shows all actions performed with Avantage (version 5.498) during an analysis of a sample.
<!-- Page reviewed 8/5-2023 jmli -->
{{Author-jmli1}}


= XPS data processing guide =


== Open data and save the processing document ==
This section is intended as an introduction to the analysis of XPS data. Simple examples are chosen to illustrate the procedures. All actions performed with Avantage (version 5.498) during an analysis of a sample are shown.  
 
Locate the .VGX file in the experiment data tree. Either open the experiment by selecting 'Open Experiment' in Avantage, or double click on the .VGX file. You will see something like this:
 
[[File:XPS-basics00.jpg|700px]]
 
It is a very good idea to save the processing document as you analyze the data (Avantage may crash some times) - to do so, select 'Save Processing Document' and you analysis will be saved as a .VGD file.
 
== Spectrum views ==
<span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Characterization/XPS/Processing/Basics#top|Go to top of this page]]</span>
 
To start analysing the data we will start by looking at the survey spectrum. Open a new processing document by clicking the button in the toolbar to the left as shown below:
 
[[File:XPS-basics01.jpg|700px]]
 
Then drag the survey spectrum into one of the quadrants in the data grid as shown below:
 
[[File:XPS-basics02.jpg|700px]]


Use the buttons as shown to the right (or below the red square) to
In case you want to follow along with your own analysis, you can download the data from [[Media:20150518_ZnO_CuZn_ZnO.doc| here (this file is a .zip file that has been renamed to .doc in order to be uploaded to LabAdviser, so download and rename to .zip and extract the files)]]
* Maximize spectrum views
* Minimize spectrum views
* Add or remove rows or columns


[[File:XPS-basics03.jpg|700px]]
# [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro|Survey spectra analysis]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Open_data_and_save_the_processing_document|Open data]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Spectrum_views|Spectrum views]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Views_of_data_with_several_etch_levels|View of data with several levels]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Zooming|Zooming]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Automatic_peak_identification_of_survey_spectra|Automatic peak ID]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Manually_add_peaks_to_identification_of_survey_spectra|Manual ID]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/1intro#Make_a_depth_profile_from_survey_spectrum|Depth profile]]
# [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres|High resolution spectra analysis]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres#Selecting_high_resolution_spectra_for_peak_fitting|Open spectra]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres#Peak_fitting|Peak fitting]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres#Verify_correctness_of_fitting_routine|Ensure correct fitting parameters]]
## [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/2highres#Change_fitting_constraints|Apply constraints]]
# [[Specific Process Knowledge/Characterization/XPS/Processing/Basics/3fitting|Complete the analysis]]

Latest revision as of 14:50, 8 May 2023

Feedback to this page: click here

Unless otherwise stated, all content on this page was created by Jonas Michael-Lindhard, DTU Nanolab

XPS data processing guide

This section is intended as an introduction to the analysis of XPS data. Simple examples are chosen to illustrate the procedures. All actions performed with Avantage (version 5.498) during an analysis of a sample are shown.

In case you want to follow along with your own analysis, you can download the data from here (this file is a .zip file that has been renamed to .doc in order to be uploaded to LabAdviser, so download and rename to .zip and extract the files)

  1. Survey spectra analysis
    1. Open data
    2. Spectrum views
    3. View of data with several levels
    4. Zooming
    5. Automatic peak ID
    6. Manual ID
    7. Depth profile
  2. High resolution spectra analysis
    1. Open spectra
    2. Peak fitting
    3. Ensure correct fitting parameters
    4. Apply constraints
  3. Complete the analysis
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