Specific Process Knowledge/Characterization/XPS/XPS elemental composition: Difference between revisions

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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Characterization/XPS/XPS_elemental_composition click here]'''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Characterization/XPS/XPS_elemental_composition click here]'''
<!-- Page reviewed 9/8-2022 jmli -->
 




=Elemental composition analysis=
=Elemental composition analysis=
{{Author-jmli1}}


[[File:Overview spectra Labadvisor.JPG|600px|XPS spectrum of a sample consisting of the elements silicon, oxygen and carbon. ]]
[[File:XPS survey.jpg|XPS spectrum of a sample consisting of the elements silicon, oxygen and carbon. {{image1}}]]


With a unique set of electronic states, each element has its own "finger-print" in the XPS spectrum. The electronic states in the atoms are occupied by electrons with a specific binding energy. In the spectrum above, the dominant peaks of carbon, oxygen and silicon are labelled. More peaks are seen in this socalled survey spectrum but they are all associated to these three elements. All elements have peaks within the wide energy range (usually 0 - 1350 eV binding energy) of the survey spectrum - hence any element that is present in the sample within its detection limit (roughly 1 % depending on element and acquisition setup) will show up in the survey spectrum as peaks of intensities that are determined by the respective concentrations.
With a unique set of electronic states, each element has its own "finger-print" in the XPS spectrum. The electronic states in the atoms are occupied by electrons with a specific binding energy. In the spectrum above, the dominant peaks of carbon, oxygen and silicon are labelled. More peaks are seen in this socalled survey spectrum but they are all associated to these three elements. All elements have peaks within the wide energy range (usually 0 - 1350 eV binding energy) of the survey spectrum - hence any element that is present in the sample within its detection limit (roughly 1 % depending on element and acquisition setup) will show up in the survey spectrum as peaks of intensities that are determined by the respective concentrations.
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== Table with approximate binding energies ==
== Table with approximate binding energies ==


The table below has been adapted from [http://xdb.lbl.gov/Section1/Sec_1-1.html].
The table below has been adapted from the web archive at https://xdb.lbl.gov/Section1/Sec_1-1.html.
 
= nyetg =
 
 
{| border="2" cellspacing="0" cellpadding="1" {{table}}
| align="center" style="background:#f0f0f0;"|'''Element'''
| align="center" style="background:#f0f0f0;"|'''K 1s'''
| align="center" style="background:#f0f0f0;"|'''L1 2s'''
| align="center" style="background:#f0f0f0;"|'''L2 2p1/2'''
| align="center" style="background:#f0f0f0;"|'''L3 2p3/2'''
| align="center" style="background:#f0f0f0;"|'''M1 3s'''
| align="center" style="background:#f0f0f0;"|'''M2 3p1/2'''
| align="center" style="background:#f0f0f0;"|'''M3 3p3/2'''
| align="center" style="background:#f0f0f0;"|'''M4 3d3/2'''
| align="center" style="background:#f0f0f0;"|'''M5 3d5/2'''
| align="center" style="background:#f0f0f0;"|'''N1 4s'''
| align="center" style="background:#f0f0f0;"|'''N2 4p1/2'''
| align="center" style="background:#f0f0f0;"|'''N3 4p3/2'''
| align="center" style="background:#f0f0f0;"|'''N5 4d5/2'''
| align="center" style="background:#f0f0f0;"|'''N6 4f5/2'''
| align="center" style="background:#f0f0f0;"|'''N7 4f7/2'''
| align="center" style="background:#f0f0f0;"|'''O1 5s'''
| align="center" style="background:#f0f0f0;"|'''O2 5p1/2'''
| align="center" style="background:#f0f0f0;"|'''O3 5p3/2'''
| align="center" style="background:#f0f0f0;"|'''O4 5d3/2'''
| align="center" style="background:#f0f0f0;"|'''O5 5d5/2'''
| align="center" style="background:#f0f0f0;"|'''P1 6s'''
| align="center" style="background:#f0f0f0;"|'''P2 6p1/2'''
| align="center" style="background:#f0f0f0;"|'''P3 6p3/2'''
|-
| '''37  Rb'''||15200||2065||1864||1804||326,7||248,7||239,1||113||112||30,5||16,3||15,3||||||||||||||||||||||
|-
| '''38  Sr'''||16105||2216||2007||1940||358,7||280,3||270||136||134,2||38,9||21,3||20,1||||||||||||||||||||||
|-
| '''39  Y'''||17038||2373||2156||2080||392||310,6||298,8||157,7||155,8||43,8||24,4||23,1||||||||||||||||||||||
|-
| '''40  Zr'''||17998||2532||2307||2223||430,3||343,5||329,8||181,1||178,8||50,6||28,5||27,1||||||||||||||||||||||
|-
| '''41  Nb'''||18986||2698||2465||2371||466,6||376,1||360,6||205||202,3||56,4||32,6||30,8||||||||||||||||||||||
|-
| '''42  Mo'''||20000||2866||2625||2520||506,3||411,6||394||231,1||227,9||63,2||37,6||35,5||||||||||||||||||||||
|-
| '''43  Tc'''||21044||3043||2793||2677||544||447,6||417,7||257,6||253,9||69,5||42,3||39,9||||||||||||||||||||||
|-
| '''44  Ru'''||22117||3224||2967||2838||586,1||483,5||461,4||284,2||280||75||46,3||43,2||||||||||||||||||||||
|-
| '''45  Rh'''||23220||3412||3146||3004||628,1||521,3||496,5||311,9||307,2||81,4||50,5||47,3||||||||||||||||||||||
|-
| '''46  Pd'''||24350||3604||3330||3173||671,6||559,9||532,3||340,5||335,2||87,1||55,7||50,9||||||||||||||||||||||
|-
| '''47  Ag'''||25514||3806||3524||3351||719||603,8||573||374||368,3||97||63,7||58,3||||||||||||||||||||||
|-
| '''48  Cd'''||26711||4018||3727||3538||772||652,6||618,4||411,9||405,2||109,8||63,9||63,9||11,7||10,7||||||||||||||||||
|-
| '''49  In'''||27940||4238||3938||3730||827,2||703,2||665,3||451,4||443,9||122,9||73,5||73,5||17,7||16,9||||||||||||||||||
|-
| '''50  Sn'''||29200||4465||4156||3929||884,7||756,5||714,6||493,2||484,9||137,1||83,6||83,6||24,9||23,9||||||||||||||||||
|-
| '''51  Sb'''||30491||4698||4380||4132||946||812,7||766,4||537,5||528,2||153,2||95,6||95,6||33,3||32,1||||||||||||||||||
|-
| '''52  Te'''||31814||4939||4612||4341||1006||870,8||820||583,4||573||169,4||103,3||103,3||41,9||40,4||||||||||||||||||
|-
| '''53  I'''||33169||5188||4852||4557||1072||931||875||630,8||619,3||186||123||123||50,6||48,9||||||||||||||||||
|-
| '''54  Xe'''||34561||5453||5107||4786||1148,7||1002,1||940,6||689||676,4||213,2||146,7||145,5||69,5||67,5||—||—||23,3||13,4||12,1||||||||
|-
| '''55  Cs'''||35985||5714||5359||5012||1211||1071||1003||740,5||726,6||232,3||172,4||161,3||79,8||77,5||—||—||22,7||14,2||12,1||||||||
|-
| '''56  Ba'''||37441||5989||5624||5247||1293||1137||1063||795,7||780,5||253,5||192||178,6||92,6||89,9||—||—||30,3||17||14,8||||||||
|-
| '''57  La'''||38925||6266||5891||5483||1362||1209||1128||853||836||274,7||205,8||196||105,3||102,5||—||—||34,3||19,3||16,8||||||||
|-
| '''58  Ce'''||40443||6549||6164||5723||1436||1274||1187||902,4||883,8||291||223,2||206,5||109||—||0,1||0,1||37,8||19,8||17||||||||
|-
| '''59  Pr'''||41991||6835||6440||5964||1511||1337||1242||948,3||928,8||304,5||236,3||217,6||115,1||115,1||2||2||37,4||22,3||22,3||||||||
|-
| '''60  Nd'''||43569||7126||6722||6208||1575||1403||1297||1003,3||980,4||319,2||243,3||224,6||120,5||120,5||1,5||1,5||37,5||21,1||21,1||||||||
|-
| '''61  Pm'''||45184||7428||7013||6459||||1471||1357||1052||1027||||242||242||120||120||—||—||—||—||—||||||||
|-
| '''62  Sm''' ||46834||7737||7312||6716||1723||1541||1420||1110,9||1083,4||347,2||265,6||247,4||129||129||5,2||5,2||37,4||21,3||21,3||||||||
|-
| '''63  Eu'''||48519||8052||7617||6977||1800||1614||1481||1158,6||1127,5||360||284||257||133||127,7||0||0||32||22||22||||||||
|-
| '''64  Gd'''||50239||8376||7930||7243||1881||1688||1544||1221,9||1189,6||378,6||286||271||—||142,6||8,6||8,6||36||28||21||||||||
|-
| '''65  Tb'''||51996||8708||8252||7514||1968||1768||1611||1276,9||1241,1||396||322,4||284,1||150,5||150,5||7,7||2,4||45,6||28,7||22,6||||||||
|-
| '''66  Dy'''||53789||9046||8581||7790||2047||1842||1676||1333||1292,6||414,2||333,5||293,2||153,6||153,6||8||4,3||49,9||26,3||26,3||||||||
|-
| '''67  Ho'''||55618||9394||8918||8071||2128||1923||1741||1392||1351||432,4||343,5||308,2||160||160||8,6||5,2||49,3||30,8||24,1||||||||
|-
| '''68  Er'''||57486||9751||9264||8358||2207||2006||1812||1453||1409||449,8||366,2||320,2||167,6||167,6||—||4,7||50,6||31,4||24,7||||||||
|-
| '''69  Tm'''||59390||10116||9617||8648||2307||2090||1885||1515||1468||470,9||385,9||332,6||175,5||175,5||—||4,6||54,7||31,8||25||||||||
|-
| '''70  Yb'''||61332||10486||9978||8944||2398||2173||1950||1576||1528||480,5||388,7||339,7||191,2||182,4||2,5||1,3||52||30,3||24,1||||||||
|-
| '''71  Lu'''||63314||10870||10349||9244||2491||2264||2024||1639||1589||506,8||412,4||359,2||206,1||196,3||8,9||7,5||57,3||33,6||26,7||||||||
|-
| '''72  Hf'''||65351||11271||10739||9561||2601||2365||2108||1716||1662||538||438,2||380,7||220||211,5||15,9||14,2||64,2||38||29,9||||||||
|-
| '''73  Ta'''||67416||11682||11136||9881||2708||2469||2194||1793||1735||563,4||463,4||400,9||237,9||226,4||23,5||21,6||69,7||42,2||32,7||||||||
|-
| '''74  W'''||69525||12100||11544||10207||2820||2575||2281||1872||1809||594,1||490,4||423,6||255,9||243,5||33,6||31,4||75,6||45,3||36,8||||||||
|-
| '''75  Re'''||71676||12527||11959||10535||2932||2682||2367||1949||1883||625,4||518,7||446,8||273,9||260,5||42,9||40,5||83||45,6||34,6||||||||
|-
| '''76  Os'''||73871||12968||12385||10871||3049||2792||2457||2031||1960||658,2||549,1||470,7||293,1||278,5||53,4||50,7||84||58||44,5||||||||
|-
| '''77  Ir'''||76111||13419||12824||11215||3174||2909||2551||2116||2040||691,1||577,8||495,8||311,9||296,3||63,8||60,8||95,2||63||48||||||||
|-
| '''78  Pt'''||78395||13880||13273||11564||3296||3027||2645||2202||2122||725,4||609,1||519,4||331,6||314,6||74,5||71,2||101,7||65,3||51,7||||||||
|-
| '''79 Au'''||80725||14353||13734||11919||3425||3148||2743||2291||2206||762,1||642,7||546,3||353,2||335,1||87,6||84||107,2||74,2||57,2||||||||
|-
| '''80  Hg'''||83102||14839||14209||12284||3562||3279||2847||2385||2295||802,2||680,2||576,6||378,2||358,8||104||99,9||127||83,1||64,5||9,6||7,8||||
|-
| '''81  Tl'''||85530||15347||14698||12658||3704||3416||2957||2485||2389||846,2||720,5||609,5||405,7||385||122,2||117,8||136||94,6||73,5||14,7||12,5||||
|-
| '''82  Pb'''||88005||15861||15200||13035||3851||3554||3066||2586||2484||891,8||761,9||643,5||434,3||412,2||141,7||136,9||147||106,4||83,3||20,7||18,1||||
|-
| '''83  Bi'''||90524||16388||15711||13419||3999||3696||3177||2688||2580||939||805,2||678,8||464||440,1||162,3||157||159,3||119||92,6||26,9||23,8||||
|-
| '''84  Po'''||93105||16939||16244||13814||4149||3854||3302||2798||2683||995||851||705||500||473||184||184||177||132||104||31||31||||
|-
| '''85  At'''||95730||17493||16785||14214||4317||4008||3426||2909||2787||1042||886||740||533||507||210||210||195||148||115||40||40||||
|-
| '''86  Rn'''||98404||18049||17337||14619||4482||4159||3538||3022||2892||1097||929||768||567||541||238||238||214||164||127||48||48||26||
|-
| '''87  Fr'''||101137||18639||17907||15031||4652||4327||3663||3136||3000||1153||980||810||603||577||268||268||234||182||140||58||58||34||15
|-
| '''88  Ra'''||103922||19237||18484||15444||4822||4490||3792||3248||3105||1208||1058||879||636||603||299||299||254||200||153||68||68||44||19
|-
| '''89  Ac'''||106755||19840||19083||15871||5002||4656||3909||3370||3219||1269||1080||890||675||639||319||319||272||215||167||80||80||—||—
|-
| '''90  Th'''||109651||20472||19693||16300||5182||4830||4046||3491||3332||1330||1168||966,4||712,1||675,2||342,4||333,1||290||229||182||92,5||85,4||41,4||24,5
|-
| '''91  Pa'''||112601||21105||20314||16733||5367||5001||4174||3611||3442||1387||1224||1007||743||708||371||360||310||232||232||94||94||—||—
|-
| '''92  U'''||115606||21757||20948||17166||5548||5182||4303||3728||3552||1439||1271||1043||778,3||736,2||388,2||377,4||321||257||192||102,8||94,2||43,9||26,8
|-
|}
 


 
=Hydrogen (1) to copper (29)=
 
=sf=


{| border="2" cellspacing="0" cellpadding="1" {{table}}
{| border="2" cellspacing="0" cellpadding="1" {{table}}
| align="center" style="background:#f0f0f0;"|'''Shell'''
| align="center" style="background:#f0f0f0;"|'''Orbital'''
| align="center" style="background:#f0f0f0;"|'''K'''
| align="center" style="background:#f0f0f0;"|'''1s'''
| align="center" style="background:#f0f0f0;"|'''L1'''
| align="center" style="background:#f0f0f0;"|'''2s'''
| align="center" style="background:#f0f0f0;"|'''L2'''
| align="center" style="background:#f0f0f0;"|'''2p<sub>1/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''L3'''
| align="center" style="background:#f0f0f0;"|'''2p<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''M1'''
| align="center" style="background:#f0f0f0;"|'''3s'''
| align="center" style="background:#f0f0f0;"|'''M2'''
| align="center" style="background:#f0f0f0;"|'''3p<sub>1/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''M3'''
| align="center" style="background:#f0f0f0;"|'''3p<sub>3/2</sub>'''
|-
| Orbital||1s||2s||2p<sub>1/2</sub>||2p<sub>3/2</sub>||3s||3p<sub>1/2</sub>||3p<sub>3/2</sub>  
|-
|-
|  ''' 1  H'''||13,6||||||||||||
|  ''' 1  H'''||13,6||||||||||||
Line 236: Line 91:
|}
|}


 
= Zink (30) to iodine (53) =
= niooib =


{| border="2" cellspacing="0" cellpadding="1" {{table}}
{| border="2" cellspacing="0" cellpadding="1" {{table}}
| align="center" style="background:#f0f0f0;"|'''Shell'''
| align="center" style="background:#f0f0f0;"|'''Orbital'''
| align="center" style="background:#f0f0f0;"|'''K'''
| align="center" style="background:#f0f0f0;"|'''1s'''
| align="center" style="background:#f0f0f0;"|'''L1'''
| align="center" style="background:#f0f0f0;"|'''2s'''
| align="center" style="background:#f0f0f0;"|'''L2'''
| align="center" style="background:#f0f0f0;"|'''2p<sub>1/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''L3'''
| align="center" style="background:#f0f0f0;"|'''2p<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''M1'''
| align="center" style="background:#f0f0f0;"|'''3s'''
| align="center" style="background:#f0f0f0;"|'''M2'''
| align="center" style="background:#f0f0f0;"|'''3p<sub>1/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''M3'''
| align="center" style="background:#f0f0f0;"|'''3p<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''M4'''
| align="center" style="background:#f0f0f0;"|'''3d<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''M5'''
| align="center" style="background:#f0f0f0;"|'''3d<sub>5/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N1'''
| align="center" style="background:#f0f0f0;"|'''4s'''
| align="center" style="background:#f0f0f0;"|'''N2'''
| align="center" style="background:#f0f0f0;"|'''4p<sub>1/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N3'''
| align="center" style="background:#f0f0f0;"|'''4p<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N5'''
| align="center" style="background:#f0f0f0;"|'''4d<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N6'''
| align="center" style="background:#f0f0f0;"|'''4d<sub>5/2</sub>'''
|-
| Orbital||1s||2s||2p<sub>1/2</sub>||2p<sub>3/2</sub>||3s||3p<sub>1/2</sub>||3p<sub>3/2</sub> ||3d<sub>3/2</sub>||3d<sub>5/2</sub>||4s||4p<sub>1/2</sub>||4p<sub>3/2</sub>||4d<sub>3/2</sub>||4d<sub>5/2</sub>
|-
|-
| '''30  Zn'''||9659||1196,2||1044,9||1021,8||139,8||91,4||88,6||10,2||10,1||||||||||
| '''30  Zn'''||9659||1196,2||1044,9||1021,8||139,8||91,4||88,6||10,2||10,1||||||||||
Line 308: Line 160:
|}
|}


=her=
=Xenon (54) to gold (79) =


{| border="2" cellspacing="0" cellpadding="1" {{table}}
{| border="2" cellspacing="0" cellpadding="1" {{table}}
| align="center" style="background:#f0f0f0;"|'''Shell'''
| align="center" style="background:#f0f0f0;"|'''Orbital'''
| align="center" style="background:#f0f0f0;"|'''K'''
| align="center" style="background:#f0f0f0;"|'''1s'''
| align="center" style="background:#f0f0f0;"|'''L1'''
| align="center" style="background:#f0f0f0;"|'''2s'''
| align="center" style="background:#f0f0f0;"|'''L2'''
| align="center" style="background:#f0f0f0;"|'''2p<sub>1/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''L3'''
| align="center" style="background:#f0f0f0;"|'''2p<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''M1'''
| align="center" style="background:#f0f0f0;"|'''3s'''
| align="center" style="background:#f0f0f0;"|'''M2'''
| align="center" style="background:#f0f0f0;"|'''3p<sub>1/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''M3'''
| align="center" style="background:#f0f0f0;"|'''3p<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''M4'''
| align="center" style="background:#f0f0f0;"|'''3d<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''M5'''
| align="center" style="background:#f0f0f0;"|'''3d<sub>5/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N1'''
| align="center" style="background:#f0f0f0;"|'''4s'''
| align="center" style="background:#f0f0f0;"|'''N2'''
| align="center" style="background:#f0f0f0;"|'''4p<sub>1/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N3'''
| align="center" style="background:#f0f0f0;"|'''4p<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N5'''
| align="center" style="background:#f0f0f0;"|'''4d<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N6'''
| align="center" style="background:#f0f0f0;"|'''4d<sub>5/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N7'''
| align="center" style="background:#f0f0f0;"|'''4f<sub>5/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''O1'''
| align="center" style="background:#f0f0f0;"|'''4f<sub>7/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''O2'''
| align="center" style="background:#f0f0f0;"|'''5s'''
| align="center" style="background:#f0f0f0;"|'''O3'''
| align="center" style="background:#f0f0f0;"|'''5p<sub>1/2</sub> '''
| align="center" style="background:#f0f0f0;"|'''O4'''
| align="center" style="background:#f0f0f0;"|'''5p<sub>3/2</sub>'''
|-
| Orbital||1s||2s||2p<sub>1/2</sub>||2p<sub>3/2</sub>||3s||3p<sub>1/2</sub>||3p<sub>3/2</sub> ||3d<sub>3/2</sub>||3d<sub>5/2</sub>||4s||4p<sub>1/2</sub>||4p<sub>3/2</sub>||4d<sub>3/2</sub>||4d<sub>5/2</sub>|| 4f<sub>5/2</sub>||4f<sub>7/2</sub>||5s||5p<sub>1/2</sub> ||5p<sub>3/2</sub>
|-
|-
| '''54  Xe'''||34561||5453||5107||4786||1148,7||1002,1||940,6||689||676,4||213,2||146,7||145,5||69,5||67,5||—||—||23,3||13,4||12,1
| '''54  Xe'''||34561||5453||5107||4786||1148,7||1002,1||940,6||689||676,4||213,2||146,7||145,5||69,5||67,5||—||—||23,3||13,4||12,1
Line 388: Line 238:
|}
|}


 
= Mercury (80) to uranium (92)=
= nut =


{| border="2" cellspacing="0" cellpadding="1" {{table}}
{| border="2" cellspacing="0" cellpadding="1" {{table}}
| align="center" style="background:#f0f0f0;"|'''Shell'''
| align="center" style="background:#f0f0f0;"|'''Orbital'''
| align="center" style="background:#f0f0f0;"|'''K'''
| align="center" style="background:#f0f0f0;"|'''1s'''
| align="center" style="background:#f0f0f0;"|'''L1'''
| align="center" style="background:#f0f0f0;"|'''2s'''
| align="center" style="background:#f0f0f0;"|'''L2'''
| align="center" style="background:#f0f0f0;"|'''2p<sub>1/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''L3'''
| align="center" style="background:#f0f0f0;"|'''2p<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''M1'''
| align="center" style="background:#f0f0f0;"|'''3s'''
| align="center" style="background:#f0f0f0;"|'''M2'''
| align="center" style="background:#f0f0f0;"|'''3p<sub>1/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''M3'''
| align="center" style="background:#f0f0f0;"|'''3p<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''M4'''
| align="center" style="background:#f0f0f0;"|'''3d<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''M5'''
| align="center" style="background:#f0f0f0;"|'''3d<sub>5/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N1'''
| align="center" style="background:#f0f0f0;"|'''4s'''
| align="center" style="background:#f0f0f0;"|'''N2'''
| align="center" style="background:#f0f0f0;"|'''4p<sub>1/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N3'''
| align="center" style="background:#f0f0f0;"|'''4p<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N4'''
| align="center" style="background:#f0f0f0;"|'''4d<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N5'''
| align="center" style="background:#f0f0f0;"|'''4d<sub>5/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N6'''
| align="center" style="background:#f0f0f0;"|'''4f<sub>5/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''N7'''
| align="center" style="background:#f0f0f0;"|'''4f<sub>7/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''O1'''
| align="center" style="background:#f0f0f0;"|'''5s'''
| align="center" style="background:#f0f0f0;"|'''O2'''
| align="center" style="background:#f0f0f0;"|'''5p<sub>1/2</sub> '''
| align="center" style="background:#f0f0f0;"|'''O3'''
| align="center" style="background:#f0f0f0;"|'''5p<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''O4'''
| align="center" style="background:#f0f0f0;"|'''5d<sub>3/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''O5'''
| align="center" style="background:#f0f0f0;"|'''5d<sub>5/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''P1'''
| align="center" style="background:#f0f0f0;"|'''6s'''
| align="center" style="background:#f0f0f0;"|'''P2'''
| align="center" style="background:#f0f0f0;"|'''6p<sub>1/2</sub>'''
| align="center" style="background:#f0f0f0;"|'''P3'''
| align="center" style="background:#f0f0f0;"|'''6p<sub>3/2</sub>'''
|-
| Orbital||1s||2s||2p<sub>1/2</sub>||2p<sub>3/2</sub>||3s||3p<sub>1/2</sub>||3p<sub>3/2</sub> ||3d<sub>3/2</sub>||3d<sub>5/2</sub>||4s||4p<sub>1/2</sub>||4p<sub>3/2</sub>||4d<sub>3/2</sub>||4d<sub>5/2</sub>|| 4f<sub>5/2</sub>||4f<sub>7/2</sub>||5s||5p<sub>1/2</sub> ||5p<sub>3/2</sub>||5d<sub>3/2</sub>||5d<sub>5/2</sub>||6s||6p<sub>1/2</sub>||6p3/2
|-
|-
| 80 Hg||83102||14839||14209||12284||3562||3279||2847||2385||2295||802,2||680,2||576,6||378,2||358,8||104||99,9||127||83,1||64,5||9,6||7,8||||||
| '''80 Hg'''||83102||14839||14209||12284||3562||3279||2847||2385||2295||802,2||680,2||576,6||378,2||358,8||104||99,9||127||83,1||64,5||9,6||7,8||||||
|-
|-
| 81  Tl||85530||15347||14698||12658||3704||3416||2957||2485||2389||846,2||720,5||609,5||405,7||385||122,2||117,8||136||94,6||73,5||14,7||12,5||||||
| '''81  Tl'''||85530||15347||14698||12658||3704||3416||2957||2485||2389||846,2||720,5||609,5||405,7||385||122,2||117,8||136||94,6||73,5||14,7||12,5||||||
|-
|-
| 82  Pb||88005||15861||15200||13035||3851||3554||3066||2586||2484||891,8||761,9||643,5||434,3||412,2||141,7||136,9||147||106,4||83,3||20,7||18,1||||||
| '''82  Pb'''||88005||15861||15200||13035||3851||3554||3066||2586||2484||891,8||761,9||643,5||434,3||412,2||141,7||136,9||147||106,4||83,3||20,7||18,1||||||
|-
|-
| 83  Bi||90524||16388||15711||13419||3999||3696||3177||2688||2580||939||805,2||678,8||464||440,1||162,3||157||159,3||119||92,6||26,9||23,8||||||
| '''83  Bi'''||90524||16388||15711||13419||3999||3696||3177||2688||2580||939||805,2||678,8||464||440,1||162,3||157||159,3||119||92,6||26,9||23,8||||||
|-
|-
| 84  Po||93105||16939||16244||13814||4149||3854||3302||2798||2683||995||851||705||500||473||184||184||177||132||104||31||31||||||
| '''84  Po'''||93105||16939||16244||13814||4149||3854||3302||2798||2683||995||851||705||500||473||184||184||177||132||104||31||31||||||
|-
|-
| 85  At||95730||17493||16785||14214||4317||4008||3426||2909||2787||1042||886||740||533||507||210||210||195||148||115||40||40||||||
| '''85  At'''||95730||17493||16785||14214||4317||4008||3426||2909||2787||1042||886||740||533||507||210||210||195||148||115||40||40||||||
|-
|-
| 86  Rn||98404||18049||17337||14619||4482||4159||3538||3022||2892||1097||929||768||567||541||238||238||214||164||127||48||48||26||||
| '''86  Rn'''||98404||18049||17337||14619||4482||4159||3538||3022||2892||1097||929||768||567||541||238||238||214||164||127||48||48||26||||
|-
|-
| 87  Fr||101137||18639||17907||15031||4652||4327||3663||3136||3000||1153||980||810||603||577||268||268||234||182||140||58||58||34||15||15
| '''87  Fr'''||101137||18639||17907||15031||4652||4327||3663||3136||3000||1153||980||810||603||577||268||268||234||182||140||58||58||34||15||15
|-
|-
| 88  Ra||103922||19237||18484||15444||4822||4490||3792||3248||3105||1208||1058||879||636||603||299||299||254||200||153||68||68||44||19|| 19
| '''88  Ra'''||103922||19237||18484||15444||4822||4490||3792||3248||3105||1208||1058||879||636||603||299||299||254||200||153||68||68||44||19|| 19
|-
|-
| 89  Ac||106755||19840||19083||15871||5002||4656||3909||3370||3219||1269||1080||890||675||639||319||319||272||215||167||80||80||—||—||-
| '''89  Ac'''||106755||19840||19083||15871||5002||4656||3909||3370||3219||1269||1080||890||675||639||319||319||272||215||167||80||80||—||—||-
|-
|-
| 90  Th||109651||20472||19693||16300||5182||4830||4046||3491||3332||1330||1168||966,4||712,1||675,2||342,4||333,1||290||229||182||92,5||85,4||41,4||24,5||16,6
| '''90  Th'''||109651||20472||19693||16300||5182||4830||4046||3491||3332||1330||1168||966,4||712,1||675,2||342,4||333,1||290||229||182||92,5||85,4||41,4||24,5||16,6
|-
|-
| 91  Pa||112601||21105||20314||16733||5367||5001||4174||3611||3442||1387||1224||1007||743||708||371||360||310||232||232||94||94||—||—||-
| '''91  Pa'''||112601||21105||20314||16733||5367||5001||4174||3611||3442||1387||1224||1007||743||708||371||360||310||232||232||94||94||—||—||-
|-
|-
| 92  U||115606||21757||20948||17166||5548||5182||4303||3728||3552||1439||1271||1043||778,3||736,2||388,2||377,4||321||257||192||102,8||94,2||43,9||26,8||16,8
| '''92  U'''||115606||21757||20948||17166||5548||5182||4303||3728||3552||1439||1271||1043||778,3||736,2||388,2||377,4||321||257||192||102,8||94,2||43,9||26,8||16,8
|-
|-
|}
|}

Latest revision as of 14:16, 8 May 2023

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Elemental composition analysis

Unless otherwise stated, all content on this page was created by Jonas Michael-Lindhard, DTU Nanolab

XPS spectrum of a sample consisting of the elements silicon, oxygen and carbon. Image: DTU Nanolab internal

With a unique set of electronic states, each element has its own "finger-print" in the XPS spectrum. The electronic states in the atoms are occupied by electrons with a specific binding energy. In the spectrum above, the dominant peaks of carbon, oxygen and silicon are labelled. More peaks are seen in this socalled survey spectrum but they are all associated to these three elements. All elements have peaks within the wide energy range (usually 0 - 1350 eV binding energy) of the survey spectrum - hence any element that is present in the sample within its detection limit (roughly 1 % depending on element and acquisition setup) will show up in the survey spectrum as peaks of intensities that are determined by the respective concentrations. As such, survey spectra are used to determined what elements are present in the sample.

For each element identified in the survey spectrum, one typically runs a spectrum at the dominant peak. These spectra have a much narrower energy ranges and therefore much smaller energy steps - this enables us to achieve much better energy resolution and hence to see the finer details of each element. These spectra, called high resolution spectra, contain the chemical information that is the strong selling point of the XPS technique.

Table with approximate binding energies

The table below has been adapted from the web archive at https://xdb.lbl.gov/Section1/Sec_1-1.html.

Hydrogen (1) to copper (29)

Orbital 1s 2s 2p1/2 2p3/2 3s 3p1/2 3p3/2
1 H 13,6
2 He 24,6
3 Li 54,7
4 Be 111,5
5 B 188
6 C 284,2
7 N 409,9 37,3
8 O 543,1 41,6
9 F 696,7
10 Ne 870,2 48,5 21,7 21,6
11 Na 1070,8 63,5 30,65 30,81
12 Mg 1303 88,7 49,78 49,5
13 Al 1559,6 117,8 72,95 72,55
14 Si 1839 149,7 99,82 99,42
15 P 2145,5 189 136 135
16 S 2472 230,9 163,6 162,5
17 Cl 2822,4 270 202 200
18 Ar 3205,9 326,3 250,6 248,4 29,3 15,9 15,7
19 K 3608,4 378,6 297,3 294,6 34,8 18,3 18,3
20 Ca 4038,5 438,4 349,7 346,2 44,3 25,4 25,4
21 Sc 4492 498 403,6 398,7 51,1 28,3 28,3
22 Ti 4966 560,9 460,2 453,8 58,7 32,6 32,6
23 V 5465 626,7 519,8 512,1 66,3 37,2 37,2
24 Cr 5989 696 583,8 574,1 74,1 42,2 42,2
25 Mn 6539 769,1 649,9 638,7 82,3 47,2 47,2
26 Fe 7112 844,6 719,9 706,8 91,3 52,7 52,7
27 Co 7709 925,1 793,2 778,1 101 58,9 59,9
28 Ni 8333 1008,6 870 852,7 110,8 68 66,2
29 Cu 8979 1096,7 952,3 932,7 122,5 77,3 75,1

Zink (30) to iodine (53)

Orbital 1s 2s 2p1/2 2p3/2 3s 3p1/2 3p3/2 3d3/2 3d5/2 4s 4p1/2 4p3/2 4d3/2 4d5/2
30 Zn 9659 1196,2 1044,9 1021,8 139,8 91,4 88,6 10,2 10,1
31 Ga 10367 1299 1143,2 1116,4 159,5 103,5 100 18,7 18,7
32 Ge 11103 1414,6 1248,1 1217 180,1 124,9 120,8 29,8 29,2
33 As 11867 1527 1359,1 1323,6 204,7 146,2 141,2 41,7 41,7
34 Se 12658 1652 1474,3 1433,9 229,6 166,5 160,7 55,5 54,6
35 Br 13474 1782 1596 1550 257 189 182 70 69
36 Kr 14326 1921 1730,9 1678,4 292,8 222,2 214,4 95 93,8 27,5 14,1 14,1
37 Rb 15200 2065 1864 1804 326,7 248,7 239,1 113 112 30,5 16,3 15,3
38 Sr 16105 2216 2007 1940 358,7 280,3 270 136 134,2 38,9 21,3 20,1
39 Y 17038 2373 2156 2080 392 310,6 298,8 157,7 155,8 43,8 24,4 23,1
40 Zr 17998 2532 2307 2223 430,3 343,5 329,8 181,1 178,8 50,6 28,5 27,1
41 Nb 18986 2698 2465 2371 466,6 376,1 360,6 205 202,3 56,4 32,6 30,8
42 Mo 20000 2866 2625 2520 506,3 411,6 394 231,1 227,9 63,2 37,6 35,5
43 Tc 21044 3043 2793 2677 544 447,6 417,7 257,6 253,9 69,5 42,3 39,9
44 Ru 22117 3224 2967 2838 586,1 483,5 461,4 284,2 280 75 46,3 43,2
45 Rh 23220 3412 3146 3004 628,1 521,3 496,5 311,9 307,2 81,4 50,5 47,3
46 Pd 24350 3604 3330 3173 671,6 559,9 532,3 340,5 335,2 87,1 55,7 50,9
47 Ag 25514 3806 3524 3351 719 603,8 573 374 368,3 97 63,7 58,3
48 Cd 26711 4018 3727 3538 772 652,6 618,4 411,9 405,2 109,8 63,9 63,9 11,7 10,7
49 In 27940 4238 3938 3730 827,2 703,2 665,3 451,4 443,9 122,9 73,5 73,5 17,7 16,9
50 Sn 29200 4465 4156 3929 884,7 756,5 714,6 493,2 484,9 137,1 83,6 83,6 24,9 23,9
51 Sb 30491 4698 4380 4132 946 812,7 766,4 537,5 528,2 153,2 95,6 95,6 33,3 32,1
52 Te 31814 4939 4612 4341 1006 870,8 820 583,4 573 169,4 103,3 103,3 41,9 40,4
53 I 33169 5188 4852 4557 1072 931 875 630,8 619,3 186 123 123 50,6 48,9

Xenon (54) to gold (79)

Orbital 1s 2s 2p1/2 2p3/2 3s 3p1/2 3p3/2 3d3/2 3d5/2 4s 4p1/2 4p3/2 4d3/2 4d5/2 4f5/2 4f7/2 5s 5p1/2 5p3/2
54 Xe 34561 5453 5107 4786 1148,7 1002,1 940,6 689 676,4 213,2 146,7 145,5 69,5 67,5 — — 23,3 13,4 12,1
55 Cs 35985 5714 5359 5012 1211 1071 1003 740,5 726,6 232,3 172,4 161,3 79,8 77,5 — — 22,7 14,2 12,1
56 Ba 37441 5989 5624 5247 1293 1137 1063 795,7 780,5 253,5 192 178,6 92,6 89,9 — — 30,3 17 14,8
57 La 38925 6266 5891 5483 1362 1209 1128 853 836 274,7 205,8 196 105,3 102,5 — — 34,3 19,3 16,8
58 Ce 40443 6549 6164 5723 1436 1274 1187 902,4 883,8 291 223,2 206,5 109 — 0,1 0,1 37,8 19,8 17
59 Pr 41991 6835 6440 5964 1511 1337 1242 948,3 928,8 304,5 236,3 217,6 115,1 115,1 2 2 37,4 22,3 22,3
60 Nd 43569 7126 6722 6208 1575 1403 1297 1003,3 980,4 319,2 243,3 224,6 120,5 120,5 1,5 1,5 37,5 21,1 21,1
61 Pm 45184 7428 7013 6459 1471 1357 1052 1027 242 242 120 120 — — — — —
62 Sm 46834 7737 7312 6716 1723 1541 1420 1110,9 1083,4 347,2 265,6 247,4 129 129 5,2 5,2 37,4 21,3 21,3
63 Eu 48519 8052 7617 6977 1800 1614 1481 1158,6 1127,5 360 284 257 133 127,7 0 0 32 22 22
64 Gd 50239 8376 7930 7243 1881 1688 1544 1221,9 1189,6 378,6 286 271 — 142,6 8,6 8,6 36 28 21
65 Tb 51996 8708 8252 7514 1968 1768 1611 1276,9 1241,1 396 322,4 284,1 150,5 150,5 7,7 2,4 45,6 28,7 22,6
66 Dy 53789 9046 8581 7790 2047 1842 1676 1333 1292,6 414,2 333,5 293,2 153,6 153,6 8 4,3 49,9 26,3 26,3
67 Ho 55618 9394 8918 8071 2128 1923 1741 1392 1351 432,4 343,5 308,2 160 160 8,6 5,2 49,3 30,8 24,1
68 Er 57486 9751 9264 8358 2207 2006 1812 1453 1409 449,8 366,2 320,2 167,6 167,6 — 4,7 50,6 31,4 24,7
69 Tm 59390 10116 9617 8648 2307 2090 1885 1515 1468 470,9 385,9 332,6 175,5 175,5 — 4,6 54,7 31,8 25
70 Yb 61332 10486 9978 8944 2398 2173 1950 1576 1528 480,5 388,7 339,7 191,2 182,4 2,5 1,3 52 30,3 24,1
71 Lu 63314 10870 10349 9244 2491 2264 2024 1639 1589 506,8 412,4 359,2 206,1 196,3 8,9 7,5 57,3 33,6 26,7
72 Hf 65351 11271 10739 9561 2601 2365 2108 1716 1662 538 438,2 380,7 220 211,5 15,9 14,2 64,2 38 29,9
73 Ta 67416 11682 11136 9881 2708 2469 2194 1793 1735 563,4 463,4 400,9 237,9 226,4 23,5 21,6 69,7 42,2 32,7
74 W 69525 12100 11544 10207 2820 2575 2281 1872 1809 594,1 490,4 423,6 255,9 243,5 33,6 31,4 75,6 45,3 36,8
75 Re 71676 12527 11959 10535 2932 2682 2367 1949 1883 625,4 518,7 446,8 273,9 260,5 42,9 40,5 83 45,6 34,6
76 Os 73871 12968 12385 10871 3049 2792 2457 2031 1960 658,2 549,1 470,7 293,1 278,5 53,4 50,7 84 58 44,5
77 Ir 76111 13419 12824 11215 3174 2909 2551 2116 2040 691,1 577,8 495,8 311,9 296,3 63,8 60,8 95,2 63 48
78 Pt 78395 13880 13273 11564 3296 3027 2645 2202 2122 725,4 609,1 519,4 331,6 314,6 74,5 71,2 101,7 65,3 51,7
79 Au 80725 14353 13734 11919 3425 3148 2743 2291 2206 762,1 642,7 546,3 353,2 335,1 87,6 84 107,2 74,2 57,2

Mercury (80) to uranium (92)

Orbital 1s 2s 2p1/2 2p3/2 3s 3p1/2 3p3/2 3d3/2 3d5/2 4s 4p1/2 4p3/2 4d3/2 4d5/2 4f5/2 4f7/2 5s 5p1/2 5p3/2 5d3/2 5d5/2 6s 6p1/2 6p3/2
80 Hg 83102 14839 14209 12284 3562 3279 2847 2385 2295 802,2 680,2 576,6 378,2 358,8 104 99,9 127 83,1 64,5 9,6 7,8
81 Tl 85530 15347 14698 12658 3704 3416 2957 2485 2389 846,2 720,5 609,5 405,7 385 122,2 117,8 136 94,6 73,5 14,7 12,5
82 Pb 88005 15861 15200 13035 3851 3554 3066 2586 2484 891,8 761,9 643,5 434,3 412,2 141,7 136,9 147 106,4 83,3 20,7 18,1
83 Bi 90524 16388 15711 13419 3999 3696 3177 2688 2580 939 805,2 678,8 464 440,1 162,3 157 159,3 119 92,6 26,9 23,8
84 Po 93105 16939 16244 13814 4149 3854 3302 2798 2683 995 851 705 500 473 184 184 177 132 104 31 31
85 At 95730 17493 16785 14214 4317 4008 3426 2909 2787 1042 886 740 533 507 210 210 195 148 115 40 40
86 Rn 98404 18049 17337 14619 4482 4159 3538 3022 2892 1097 929 768 567 541 238 238 214 164 127 48 48 26
87 Fr 101137 18639 17907 15031 4652 4327 3663 3136 3000 1153 980 810 603 577 268 268 234 182 140 58 58 34 15 15
88 Ra 103922 19237 18484 15444 4822 4490 3792 3248 3105 1208 1058 879 636 603 299 299 254 200 153 68 68 44 19 19
89 Ac 106755 19840 19083 15871 5002 4656 3909 3370 3219 1269 1080 890 675 639 319 319 272 215 167 80 80 — — -
90 Th 109651 20472 19693 16300 5182 4830 4046 3491 3332 1330 1168 966,4 712,1 675,2 342,4 333,1 290 229 182 92,5 85,4 41,4 24,5 16,6
91 Pa 112601 21105 20314 16733 5367 5001 4174 3611 3442 1387 1224 1007 743 708 371 360 310 232 232 94 94 — — -
92 U 115606 21757 20948 17166 5548 5182 4303 3728 3552 1439 1271 1043 778,3 736,2 388,2 377,4 321 257 192 102,8 94,2 43,9 26,8 16,8
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