Specific Process Knowledge/Etch/Titanium Oxide/ICP metal: Difference between revisions
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Recipe used: Ti etch | ===Etching of TiO2 using ICP metal has been tested Evgeniy Shkondin, DTU Nanolab=== | ||
Recipe used: Ti etch <br> | |||
[[image:TiO2_etch_Evgeniy2.jpg|400px]] | [[image:TiO2_etch_Evgeniy2.jpg|400px]] |
Latest revision as of 10:44, 24 March 2023
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