Specific Process Knowledge/Etch/Overview of chemicals: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Overview_of_chemicals click here]''' | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Overview_of_chemicals click here]''' | ||
'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.''' | |||
'''All links to Labmanager requires login.''' | |||
'''All measurements on this page has been made by Nanolab staff.''' | |||
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]= | =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]= | ||
Descreption: On this page you can have an overveiw of the standardt Chimicals we have in the Cleenroom, as well as link to Kemibrug for those chemicals. you will also be able to see if there is any change in the chemicals we have or something else about them in the commets. | |||
{| border="2" cellspacing="0" cellpadding="10" | {| border="2" cellspacing="0" cellpadding="10" | ||
| Line 12: | Line 19: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Acetone | !style="background:silver; color:black;" align="left"|Acetone | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETExFTkhFSlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 67-64-1] | ||
67-64-1 | |||
!style="background:LightGrey; color:black;"|99,8%-100% | !style="background:LightGrey; color:black;"|99,8%-100% | ||
!style="background:LightGrey; color:black;"|VLSi | !style="background:LightGrey; color:black;"|VLSi | ||
| Line 19: | Line 25: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Ammoniumhydroxyd | !style="background:silver; color:black;" align="left"|Ammoniumhydroxyd | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier?casnr=1336-21-6&pnr=&KBAOnly=false&SearchInNotes=false&NormalSearchKemikalier=true&NormalSearchKemikalier=false&WildCardSearchKemikalier=false&ExactSearchKemikalier=false&inklNoter=false&selectedLangtidsvirkning= Cas Nr. 1336-21-6] | ||
1336-21-6 | |||
!style="background:LightGrey; color:black;"|28% | !style="background:LightGrey; color:black;"|28% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 26: | Line 31: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Ammoniumperoxodisulfat | !style="background:silver; color:black;" align="left"|Ammoniumperoxodisulfat | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESUlKRUpFRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7727-54-0] | ||
7727-54-0 | |||
!style="background:LightGrey; color:black;"|98%-99,1% | !style="background:LightGrey; color:black;"|98%-99,1% | ||
!style="background:LightGrey; color:black;"|Analyse | !style="background:LightGrey; color:black;"|Analyse | ||
| Line 33: | Line 37: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Anisole Anhydrous | !style="background:silver; color:black;" align="left"|Anisole Anhydrous | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESU1NTkVKVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. 100-66-3] | ||
100-66-3 | |||
!style="background:LightGrey; color:black;"|99,7% | !style="background:LightGrey; color:black;"|99,7% | ||
!style="background:LightGrey; color:black;"|GPR | !style="background:LightGrey; color:black;"|GPR | ||
| Line 40: | Line 43: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AR-600-546 Developer | !style="background:silver; color:black;" align="left"|AR-600-546 Developer | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLSEtGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | !style="background:LightGrey; color:black;"|not specified | ||
!style="background:LightGrey; color:black;"|not | !style="background:LightGrey; color:black;"|not specified | ||
!style="background:LightGrey; color:black;"|not | |||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AR-600-71 Remover | !style="background:silver; color:black;" align="left"|AR-600-71 Remover | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLRkxFRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 54: | Line 55: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AR-6200.09 E-beam resist | !style="background:silver; color:black;" align="left"|AR-6200.09 E-beam resist | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLR0xMSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 61: | Line 61: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AZ 351B Developer | !style="background:silver; color:black;" align="left"|AZ 351B Developer | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES01NTUdMRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 68: | Line 67: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AZ 4562 Photoresist | !style="background:silver; color:black;" align="left"|AZ 4562 Photoresist | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEtKSEVKSFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 75: | Line 73: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AZ 5214E Photoresist | !style="background:silver; color:black;" align="left"|AZ 5214E Photoresist | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEdKTEdJSFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 82: | Line 79: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AZ 726MIF developer | !style="background:silver; color:black;" align="left"|AZ 726MIF developer | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkVFTUVGR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 89: | Line 85: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AZ 726MIF developer (Tromle) | !style="background:silver; color:black;" align="left"|AZ 726MIF developer (Tromle) | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkVFTUVGR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 96: | Line 91: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AZ MiR 701 (29CPS) Photoresist | !style="background:silver; color:black;" align="left"|AZ MiR 701 (29CPS) Photoresist | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkVGTU5NSFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. No nr.] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 103: | Line 97: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AZ nLOF 2020 Photoresist | !style="background:silver; color:black;" align="left"|AZ nLOF 2020 Photoresist | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEtGS0ZNSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 110: | Line 103: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Boric Acid powder | !style="background:silver; color:black;" align="left"|Boric Acid powder | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUZGS0pJR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 10043-35-3] | ||
10043-35-3 | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|Analytic | !style="background:LightGrey; color:black;"|Analytic | ||
| Line 117: | Line 109: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Chrome etch 18 | !style="background:silver; color:black;" align="left"|Chrome etch 18 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0hHR0pMS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 124: | Line 115: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L | !style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETE5FSkVMS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 108-10-1] | ||
108-10-1 | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 131: | Line 121: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid | !style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkdNR0tITVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|Aicello | !style="background:LightGrey; color:black;"|Aicello | ||
| Line 138: | Line 127: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Ethanol | !style="background:silver; color:black;" align="left"|Ethanol | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUpFRklGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 64-17-5] | ||
64-17-5 | |||
!style="background:LightGrey; color:black;"|99,9%-100% | !style="background:LightGrey; color:black;"|99,9%-100% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 145: | Line 133: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE) | !style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE) | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUdJSUpNS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|12,5% | !style="background:LightGrey; color:black;"|12,5% | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 152: | Line 139: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent) | !style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent) | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUZKS01LSlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|12,5% | !style="background:LightGrey; color:black;"|12,5% | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 159: | Line 145: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hexamethyldisilasan | !style="background:silver; color:black;" align="left"|Hexamethyldisilasan | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhER0VFRkxJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. 999-97-3] | ||
999-97-3 | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 166: | Line 151: | ||
|- | |- | ||
!style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF) | !style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF) | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSkpITVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
|style="background:LightGrey; color:black"|1% | |style="background:LightGrey; color:black"|1% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
|style="background:WhiteSmoke; color:black"|Comment | |style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSkhLTlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. No nr.] | ||
|style="background:LightGrey; color:black"|10% | |style="background:LightGrey; color:black"|10% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"|Will be removed ones we no longer have any in storage | ||
|- | |- | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSktOTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
|style="background:LightGrey; color:black"|40% | |style="background:LightGrey; color:black"|40% | ||
!style="background:LightGrey; color:black;"|EMSURE® ISO for analysis | !style="background:LightGrey; color:black;"|EMSURE® ISO for analysis | ||
|style="background:WhiteSmoke; color:black"|Comment | |style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0pJTEtJR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
|style="background:LightGrey; color:black"|50% | |style="background:LightGrey; color:black"|50% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 191: | Line 172: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hydrochloric acid | !style="background:silver; color:black;" align="left"|Hydrochloric acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. 7647-01-0 | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElITUpITlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7647-01-0] | ||
!style="background:LightGrey; color:black;"|37% | !style="background:LightGrey; color:black;"|37% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 197: | Line 178: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hydrogenperoxid | !style="background:silver; color:black;" align="left"|Hydrogenperoxid | ||
!style="background:LightGrey; color:black;"|Cas Nr. 7722-84-1 | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESUlKRUVISVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7722-84-1] | ||
!style="background:LightGrey; color:black;"|31% | !style="background:LightGrey; color:black;"|31% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 203: | Line 184: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal | !style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGSk1GSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 210: | Line 190: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal | !style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGSklKRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 217: | Line 196: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Microposit Remover 1165 | !style="background:silver; color:black;" align="left"|Microposit Remover 1165 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0VOSUpFVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|Grade | !style="background:LightGrey; color:black;"|Grade | ||
| Line 224: | Line 202: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Nitric acid | !style="background:silver; color:black;" align="left"|Nitric acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEpITkVGTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 231-714-2] | ||
231-714-2 | |||
!style="background:LightGrey; color:black;"|69% | !style="background:LightGrey; color:black;"|69% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 231: | Line 208: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid | !style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElMTEdOS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7664-38-2] | ||
7664-38-2 | |||
!style="background:LightGrey; color:black;"|85% | !style="background:LightGrey; color:black;"|85% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 238: | Line 214: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Potassium hydroxide solution | !style="background:silver; color:black;" align="left"|Potassium hydroxide solution | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETE1IS0xIRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 1310-58-3] | ||
1310-58-3 | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|Selectipur | !style="background:LightGrey; color:black;"|Selectipur | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"| | !style="background:silver; color:black;" align="left"|Isoropanol | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEhITUlHRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 67-63-0] | ||
67-63-0 | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|VLSi | !style="background:LightGrey; color:black;"|VLSi | ||
| Line 252: | Line 226: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 2005 | !style="background:silver; color:black;" align="left"|SU-8 2005 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr] | ||
no .nr | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 259: | Line 232: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 2035 | !style="background:silver; color:black;" align="left"|SU-8 2035 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr] | ||
no nr | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 266: | Line 238: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 2075 | !style="background:silver; color:black;" align="left"|SU-8 2075 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr] | ||
no nr | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 273: | Line 244: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600) | !style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600) | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkdITklFVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 280: | Line 250: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 Thinner | !style="background:silver; color:black;" align="left"|SU-8 Thinner | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0dLRktGVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 287: | Line 256: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Sulfamic acid | !style="background:silver; color:black;" align="left"|Sulfamic acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESklISUVLS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 5329-14-6] | ||
5329-14-6 | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|Alkamlimetry | !style="background:LightGrey; color:black;"|Alkamlimetry | ||
| Line 294: | Line 262: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Sulfuric acid | !style="background:silver; color:black;" align="left"|Sulfuric acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElMTk1GTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7664-93-9] | ||
7664-93-9 | |||
!style="background:LightGrey; color:black;"|95%-97% | !style="background:LightGrey; color:black;"|95%-97% | ||
!style="background:LightGrey; color:black;"|VLSI | !style="background:LightGrey; color:black;"|VLSI | ||
| Line 301: | Line 268: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|TI spray | !style="background:silver; color:black;" align="left"|TI spray | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUlHSE1NTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 308: | Line 274: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|ZED N50 | !style="background:silver; color:black;" align="left"|ZED N50 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpOTUlMVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | ||
no nr. | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
| Line 315: | Line 280: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Triton x-100 | !style="background:silver; color:black;" align="left"|Triton x-100 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEdORUlJRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 9002-93-1] | ||
9002-93-1 | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
Latest revision as of 10:21, 27 February 2023
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Descreption: On this page you can have an overveiw of the standardt Chimicals we have in the Cleenroom, as well as link to Kemibrug for those chemicals. you will also be able to see if there is any change in the chemicals we have or something else about them in the commets.
| Chemical | Cas Nr. | Concentration | Grade | Comment |
|---|---|---|---|---|
| Acetone | Cas Nr. 67-64-1 | 99,8%-100% | VLSi | |
| Ammoniumhydroxyd | Cas Nr. 1336-21-6 | 28% | VLSI | Comment |
| Ammoniumperoxodisulfat | Cas Nr. 7727-54-0 | 98%-99,1% | Analyse | Comment |
| Anisole Anhydrous | Cas Nr. 100-66-3 | 99,7% | GPR | Comment |
| AR-600-546 Developer | Cas Nr. no nr. | not specified | not specified | Comment |
| AR-600-71 Remover | Cas Nr. no nr. | not specific | not specific | Comment |
| AR-6200.09 E-beam resist | Cas Nr. no nr. | not specific | not specific | Comment |
| AZ 351B Developer | Cas Nr. no nr. | not specific | not specific | Comment |
| AZ 4562 Photoresist | Cas Nr. no nr. | not specific | not specific | Comment |
| AZ 5214E Photoresist | Cas Nr. no nr. | not specific | not specific | Comment |
| AZ 726MIF developer | Cas Nr. no nr. | not specific | not specific | Comment |
| AZ 726MIF developer (Tromle) | Cas Nr. no nr. | not specific | not specific | Comment |
| AZ MiR 701 (29CPS) Photoresist | Cas Nr. No nr. | not specific | not specific | Comment |
| AZ nLOF 2020 Photoresist | Cas Nr. no nr. | not specific | not specific | Comment |
| Boric Acid powder | Cas Nr. 10043-35-3 | not specific | Analytic | Comment |
| Chrome etch 18 | Cas Nr. no nr. | not specific | not specific | Comment |
| Developer MIBK Methylisobutylketon 4L | Cas Nr. 108-10-1 | not specific | VLSI | Comment |
| DUV42S-6,4 L ultra nowpak W/Closure lid | Cas Nr. no nr. | not specific | Aicello | Comment |
| Ethanol | Cas Nr. 64-17-5 | 99,9%-100% | VLSI | Comment |
| Hydrofluoric acid buffer (BHF/BOE) | Cas Nr. no nr. | 12,5% | not specific | Comment |
| Hydrofluoric acid buffer (BHF/BOE W/wetting agent) | Cas Nr. no nr. | 12,5% | not specific | Comment |
| Hexamethyldisilasan | Cas Nr. 999-97-3 | not specific | not specific | Comment |
| HYDROFLUORIC ACID (HF) | Cas Nr. no nr. | 1% | VLSI | Comment |
| Cas Nr. No nr. | 10% | VLSI | Will be removed ones we no longer have any in storage | |
| Cas Nr. no nr. | 40% | EMSURE® ISO for analysis | Comment | |
| Cas Nr. no nr. | 50% | VLSI | Comment | |
| Hydrochloric acid | Cas Nr. 7647-01-0 | 37% | VLSI | Comment |
| Hydrogenperoxid | Cas Nr. 7722-84-1 | 31% | VLSI | Comment |
| KRF m230Y 6cP Gal | Cas Nr. no nr. | not specific | not specific | Comment |
| KRF M35G 27cP Gal | Cas Nr. no nr. | not specific | not specific | Comment |
| Microposit Remover 1165 | Cas Nr. no nr. | not specific | Grade | Comment |
| Nitric acid | Cas Nr. 231-714-2 | 69% | VLSI | Comment |
| Ortho-Phosphoric acid | Cas Nr. 7664-38-2 | 85% | VLSI | Comment |
| Potassium hydroxide solution | Cas Nr. 1310-58-3 | not specific | Selectipur | Comment |
| Isoropanol | Cas Nr. 67-63-0 | not specific | VLSi | Comment |
| SU-8 2005 | Cas Nr. no .nr | not specific | not specific | Comment |
| SU-8 2035 | Cas Nr. no .nr | not specific | not specific | Comment |
| SU-8 2075 | Cas Nr. no .nr | not specific | not specific | Comment |
| SU-8 Developer (Mr-dev 600) | Cas Nr. no nr. | not specific | not specific | Comment |
| SU-8 Thinner | Cas Nr. no nr. | not specific | not specific | Comment |
| Sulfamic acid | Cas Nr. 5329-14-6 | not specific | Alkamlimetry | Comment |
| Sulfuric acid | Cas Nr. 7664-93-9 | 95%-97% | VLSI | Comment |
| TI spray | Cas Nr. no nr. | not specific | not specific | Comment |
| ZED N50 | Cas Nr. no nr. | not specific | not specific | Comment |
| Triton x-100 | Cas Nr. 9002-93-1 | not specific | not specific | Comment |