Specific Process Knowledge/Etch/Overview of chemicals: Difference between revisions
No edit summary |
|||
(9 intermediate revisions by 3 users not shown) | |||
Line 1: | Line 1: | ||
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Overview_of_chemicals click here]''' | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Overview_of_chemicals click here]''' | ||
'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.''' | |||
'''All links to Labmanager requires login.''' | |||
'''All measurements on this page has been made by Nanolab staff.''' | |||
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]= | =<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]= | ||
Descreption: On this page you can have an overveiw of the standardt Chimicals we have in the Cleenroom, as well as link to Kemibrug for those chemicals. you will also be able to see if there is any change in the chemicals we have or something else about them in the commets. | |||
{| border="2" cellspacing="0" cellpadding="10" | {| border="2" cellspacing="0" cellpadding="10" | ||
Line 12: | Line 19: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Acetone | !style="background:silver; color:black;" align="left"|Acetone | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETExFTkhFSlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 67-64-1] | ||
!style="background:LightGrey; color:black;"|99,8%-100% | !style="background:LightGrey; color:black;"|99,8%-100% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|VLSi | ||
!style="background:WhiteSmoke; color:black"| | !style="background:WhiteSmoke; color:black"| | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Ammoniumhydroxyd | !style="background:silver; color:black;" align="left"|Ammoniumhydroxyd | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier?casnr=1336-21-6&pnr=&KBAOnly=false&SearchInNotes=false&NormalSearchKemikalier=true&NormalSearchKemikalier=false&WildCardSearchKemikalier=false&ExactSearchKemikalier=false&inklNoter=false&selectedLangtidsvirkning= Cas Nr. 1336-21-6] | ||
!style="background:LightGrey; color:black;"|28% | !style="background:LightGrey; color:black;"|28% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|VLSI | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Ammoniumperoxodisulfat | !style="background:silver; color:black;" align="left"|Ammoniumperoxodisulfat | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESUlKRUpFRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7727-54-0] | ||
!style="background:LightGrey; color:black;"|98%-99,1% | !style="background:LightGrey; color:black;"|98%-99,1% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|Analyse | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Anisole Anhydrous | !style="background:silver; color:black;" align="left"|Anisole Anhydrous | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESU1NTkVKVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. 100-66-3] | ||
!style="background:LightGrey; color:black;"|99,7% | !style="background:LightGrey; color:black;"|99,7% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|GPR | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AR-600-546 Developer | !style="background:silver; color:black;" align="left"|AR-600-546 Developer | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLSEtGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not | !style="background:LightGrey; color:black;"|not specified | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|not specified | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AR-600-71 Remover | !style="background:silver; color:black;" align="left"|AR-600-71 Remover | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLRkxFRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AR-6200.09 E-beam resist | !style="background:silver; color:black;" align="left"|AR-6200.09 E-beam resist | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkZLR0xMSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AZ 351B Developer | !style="background:silver; color:black;" align="left"|AZ 351B Developer | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES01NTUdMRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AZ 4562 Photoresist | !style="background:silver; color:black;" align="left"|AZ 4562 Photoresist | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEtKSEVKSFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AZ 5214E Photoresist | !style="background:silver; color:black;" align="left"|AZ 5214E Photoresist | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEdKTEdJSFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AZ 726MIF developer | !style="background:silver; color:black;" align="left"|AZ 726MIF developer | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkVFTUVGR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AZ 726MIF developer (Tromle) | !style="background:silver; color:black;" align="left"|AZ 726MIF developer (Tromle) | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkVFTUVGR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AZ MiR 701 (29CPS) Photoresist | !style="background:silver; color:black;" align="left"|AZ MiR 701 (29CPS) Photoresist | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkVGTU5NSFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. No nr.] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|AZ nLOF 2020 Photoresist | !style="background:silver; color:black;" align="left"|AZ nLOF 2020 Photoresist | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEtGS0ZNSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Boric Acid powder | !style="background:silver; color:black;" align="left"|Boric Acid powder | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUZGS0pJR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 10043-35-3] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|Analytic | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Chrome etch 18 | !style="background:silver; color:black;" align="left"|Chrome etch 18 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0hHR0pMS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L | !style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETE5FSkVMS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 108-10-1] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|VLSI | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid | !style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhERkdNR0tITVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|Aicello | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Ethanol | !style="background:silver; color:black;" align="left"|Ethanol | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUpFRklGS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 64-17-5] | ||
!style="background:LightGrey; color:black;"|99,9%-100% | !style="background:LightGrey; color:black;"|99,9%-100% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|VLSI | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE) | !style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE) | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUdJSUpNS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|12,5% | !style="background:LightGrey; color:black;"|12,5% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent) | !style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent) | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUZKS01LSlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|12,5% | !style="background:LightGrey; color:black;"|12,5% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hexamethyldisilasan | !style="background:silver; color:black;" align="left"|Hexamethyldisilasan | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhER0VFRkxJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. 999-97-3] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF) | !style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF) | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSkpITVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
|style="background:LightGrey; color:black"|1% | |style="background:LightGrey; color:black"|1% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|VLSI | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSkhLTlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. No nr.] | ||
|style="background:LightGrey; color:black"|10% | |style="background:LightGrey; color:black"|10% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|VLSI | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"|Will be removed ones we no longer have any in storage | ||
|- | |- | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUhLSktOTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
|style="background:LightGrey; color:black"|40% | |style="background:LightGrey; color:black"|40% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|EMSURE® ISO for analysis | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0pJTEtJR1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
|style="background:LightGrey; color:black"|50% | |style="background:LightGrey; color:black"|50% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|VLSI | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hydrochloric acid | !style="background:silver; color:black;" align="left"|Hydrochloric acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElITUpITlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7647-01-0] | ||
!style="background:LightGrey; color:black;"|37% | !style="background:LightGrey; color:black;"|37% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|VLSI | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Hydrogenperoxid | !style="background:silver; color:black;" align="left"|Hydrogenperoxid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESUlKRUVISVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7722-84-1] | ||
!style="background:LightGrey; color:black;"|31% | !style="background:LightGrey; color:black;"|31% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|VLSI | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal | !style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGSk1GSVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal | !style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpGSklKRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Microposit Remover 1165 | !style="background:silver; color:black;" align="left"|Microposit Remover 1165 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0VOSUpFVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"|Grade | !style="background:LightGrey; color:black;"|Grade | ||
Line 195: | Line 202: | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Nitric acid | !style="background:silver; color:black;" align="left"|Nitric acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEpITkVGTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 231-714-2] | ||
!style="background:LightGrey; color:black;"|69% | !style="background:LightGrey; color:black;"|69% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|VLSI | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid | !style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElMTEdOS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7664-38-2] | ||
!style="background:LightGrey; color:black;"|85% | !style="background:LightGrey; color:black;"|85% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|VLSI | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Potassium hydroxide solution | !style="background:silver; color:black;" align="left"|Potassium hydroxide solution | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETE1IS0xIRVRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 1310-58-3] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|Selectipur | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"| | !style="background:silver; color:black;" align="left"|Isoropanol | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEhITUlHRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 67-63-0] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|VLSi | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 2005 | !style="background:silver; color:black;" align="left"|SU-8 2005 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 2035 | !style="background:silver; color:black;" align="left"|SU-8 2035 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 2075 | !style="background:silver; color:black;" align="left"|SU-8 2075 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0lFRUVJVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no .nr] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600) | !style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600) | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETkdITklFVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|SU-8 Thinner | !style="background:silver; color:black;" align="left"|SU-8 Thinner | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhES0dLRktGVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Sulfamic acid | !style="background:silver; color:black;" align="left"|Sulfamic acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESklISUVLS1RkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 5329-14-6] | ||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|Alkamlimetry | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Sulfuric acid | !style="background:silver; color:black;" align="left"|Sulfuric acid | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETElMTk1GTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 7664-93-9] | ||
!style="background:LightGrey; color:black;"|95%-97% | !style="background:LightGrey; color:black;"|95%-97% | ||
!style="background:LightGrey; color:black;"| | !style="background:LightGrey; color:black;"|VLSI | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|TI spray | !style="background:silver; color:black;" align="left"|TI spray | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETUlHSE1NTFRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|ZED N50 | !style="background:silver; color:black;" align="left"|ZED N50 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhESkpOTUlMVGQlYzIlODclN2N2JWMyJTgzJTdlJWMyJTg4diVjMiU4OSU3ZSVjMiU4NCVjMiU4MyVjMiU4OCU1ZVlSSQ==#K Cas Nr. no nr.] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
!style="background:silver; color:black;" align="left"|Triton x-100 | !style="background:silver; color:black;" align="left"|Triton x-100 | ||
!style="background:LightGrey; color:black;"|Cas Nr. | !style="background:LightGrey; color:black;"|[https://kemibrug.dk/Kemikalier/Action?id=RCU2MHolYzIlODIlN2UlYzIlODB2JWMyJTgxJTdleiVjMiU4N0RZeiVjMiU4OXYlN2UlYzIlODElYzIlODhETEdORUlJRlRkJWMyJTg3JTdjdiVjMiU4MyU3ZSVjMiU4OHYlYzIlODklN2UlYzIlODQlYzIlODMlYzIlODglNWVZUkk=#K Cas Nr. 9002-93-1] | ||
!style="background:LightGrey; color:black;"|not specific | |||
!style="background:LightGrey; color:black;"|not specific | !style="background:LightGrey; color:black;"|not specific | ||
!style="background:WhiteSmoke; color:black"|Comment | !style="background:WhiteSmoke; color:black"|Comment | ||
|- | |- | ||
|} | |} |
Latest revision as of 10:21, 27 February 2023
Feedback to this page: click here
Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.
All links to Labmanager requires login.
All measurements on this page has been made by Nanolab staff.
THIS PAGE IS UNDER CONSTRUCTION
Descreption: On this page you can have an overveiw of the standardt Chimicals we have in the Cleenroom, as well as link to Kemibrug for those chemicals. you will also be able to see if there is any change in the chemicals we have or something else about them in the commets.
Chemical | Cas Nr. | Concentration | Grade | Comment |
---|---|---|---|---|
Acetone | Cas Nr. 67-64-1 | 99,8%-100% | VLSi | |
Ammoniumhydroxyd | Cas Nr. 1336-21-6 | 28% | VLSI | Comment |
Ammoniumperoxodisulfat | Cas Nr. 7727-54-0 | 98%-99,1% | Analyse | Comment |
Anisole Anhydrous | Cas Nr. 100-66-3 | 99,7% | GPR | Comment |
AR-600-546 Developer | Cas Nr. no nr. | not specified | not specified | Comment |
AR-600-71 Remover | Cas Nr. no nr. | not specific | not specific | Comment |
AR-6200.09 E-beam resist | Cas Nr. no nr. | not specific | not specific | Comment |
AZ 351B Developer | Cas Nr. no nr. | not specific | not specific | Comment |
AZ 4562 Photoresist | Cas Nr. no nr. | not specific | not specific | Comment |
AZ 5214E Photoresist | Cas Nr. no nr. | not specific | not specific | Comment |
AZ 726MIF developer | Cas Nr. no nr. | not specific | not specific | Comment |
AZ 726MIF developer (Tromle) | Cas Nr. no nr. | not specific | not specific | Comment |
AZ MiR 701 (29CPS) Photoresist | Cas Nr. No nr. | not specific | not specific | Comment |
AZ nLOF 2020 Photoresist | Cas Nr. no nr. | not specific | not specific | Comment |
Boric Acid powder | Cas Nr. 10043-35-3 | not specific | Analytic | Comment |
Chrome etch 18 | Cas Nr. no nr. | not specific | not specific | Comment |
Developer MIBK Methylisobutylketon 4L | Cas Nr. 108-10-1 | not specific | VLSI | Comment |
DUV42S-6,4 L ultra nowpak W/Closure lid | Cas Nr. no nr. | not specific | Aicello | Comment |
Ethanol | Cas Nr. 64-17-5 | 99,9%-100% | VLSI | Comment |
Hydrofluoric acid buffer (BHF/BOE) | Cas Nr. no nr. | 12,5% | not specific | Comment |
Hydrofluoric acid buffer (BHF/BOE W/wetting agent) | Cas Nr. no nr. | 12,5% | not specific | Comment |
Hexamethyldisilasan | Cas Nr. 999-97-3 | not specific | not specific | Comment |
HYDROFLUORIC ACID (HF) | Cas Nr. no nr. | 1% | VLSI | Comment |
Cas Nr. No nr. | 10% | VLSI | Will be removed ones we no longer have any in storage | |
Cas Nr. no nr. | 40% | EMSURE® ISO for analysis | Comment | |
Cas Nr. no nr. | 50% | VLSI | Comment | |
Hydrochloric acid | Cas Nr. 7647-01-0 | 37% | VLSI | Comment |
Hydrogenperoxid | Cas Nr. 7722-84-1 | 31% | VLSI | Comment |
KRF m230Y 6cP Gal | Cas Nr. no nr. | not specific | not specific | Comment |
KRF M35G 27cP Gal | Cas Nr. no nr. | not specific | not specific | Comment |
Microposit Remover 1165 | Cas Nr. no nr. | not specific | Grade | Comment |
Nitric acid | Cas Nr. 231-714-2 | 69% | VLSI | Comment |
Ortho-Phosphoric acid | Cas Nr. 7664-38-2 | 85% | VLSI | Comment |
Potassium hydroxide solution | Cas Nr. 1310-58-3 | not specific | Selectipur | Comment |
Isoropanol | Cas Nr. 67-63-0 | not specific | VLSi | Comment |
SU-8 2005 | Cas Nr. no .nr | not specific | not specific | Comment |
SU-8 2035 | Cas Nr. no .nr | not specific | not specific | Comment |
SU-8 2075 | Cas Nr. no .nr | not specific | not specific | Comment |
SU-8 Developer (Mr-dev 600) | Cas Nr. no nr. | not specific | not specific | Comment |
SU-8 Thinner | Cas Nr. no nr. | not specific | not specific | Comment |
Sulfamic acid | Cas Nr. 5329-14-6 | not specific | Alkamlimetry | Comment |
Sulfuric acid | Cas Nr. 7664-93-9 | 95%-97% | VLSI | Comment |
TI spray | Cas Nr. no nr. | not specific | not specific | Comment |
ZED N50 | Cas Nr. no nr. | not specific | not specific | Comment |
Triton x-100 | Cas Nr. 9002-93-1 | not specific | not specific | Comment |