Specific Process Knowledge/Characterization/Probe station: Difference between revisions
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'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.''' | |||
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==Probe station== | ==Probe station== | ||
[[Image:probe2.jpg|thumb|300x300px|Probe station. Positioned in serviceroom CX1]] | [[Image:probe2.jpg|thumb|300x300px|Probe station. Positioned in serviceroom CX1]] | ||
'''Feedback to this page''': '''[mailto:labadviser@ | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Probe_station click here]''' | ||
The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc. It has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected probes. The stage can be moved in x and y to step and repeat a measurement over a large number of chips. | |||
Samples can be inspected by either a microscope and/or a camera. | |||
Two Keithley 2450 source meters are connected to the probe station by triax cables. An additional Keithley 2410 source meter and a Keithley 2000 multi meter is connected by coax cables. All Keithleys can also be connected with banana wires. | |||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||
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*I/V | *I/V | ||
*Resistance | *Resistance | ||
* | *Data collection by PC possible | ||
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!style="background:silver; color:black" align="center"| | !style="background:silver; color:black" align="center"| | ||
Latest revision as of 15:29, 6 February 2023
Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.
All links to Kemibrug (SDS) and Labmanager Including APV and QC requires login.
Probe station
Feedback to this page: click here
The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc. It has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected probes. The stage can be moved in x and y to step and repeat a measurement over a large number of chips.
Samples can be inspected by either a microscope and/or a camera.
Two Keithley 2450 source meters are connected to the probe station by triax cables. An additional Keithley 2410 source meter and a Keithley 2000 multi meter is connected by coax cables. All Keithleys can also be connected with banana wires.
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Purpose |
Electrical measurements |
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|---|---|---|
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Performance |
Pad size |
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Substrates |
Batch size |
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| Substrate materials allowed |
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The user manual, technical information and contact information can be found in LabManager: