Specific Process Knowledge/Characterization/Probe station: Difference between revisions

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==Probe Station==
'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.'''


'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Probe Station click here]'''  
'''All links to Kemibrug (SDS) and Labmanager Including APV and QC requires login.'''
 
==Probe station==
[[Image:probe2.jpg|thumb|300x300px|Probe station. Positioned in serviceroom CX1]]
 
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Probe_station click here]'''
 
The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc. It has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected probes. The stage can be moved in x and y to step and repeat a measurement over a large number of chips.
 
Samples can be inspected by either a microscope and/or a camera. 
 
Two Keithley 2450 source meters are connected to the probe station by triax cables. An additional Keithley 2410 source meter and a Keithley 2000 multi meter is connected by coax cables. All Keithleys can also be connected with banana wires.
 
==Equipment performance and process related parameters==
 
{| border="2" cellspacing="2" cellpadding="3"
 
|-
!style="background:silver; color:black;" align="center"|
Purpose
|style="background:LightGrey; color:black"|
Electrical measurements
|style="background:WhiteSmoke; color:black"|
*I/V
*Resistance
*Data collection by PC possible
|-
!style="background:silver; color:black" align="center"|
Performance
|style="background:LightGrey; color:black"|
Pad size
|style="background:WhiteSmoke; color:black"|
*100x100µm or more
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|
Substrates
|style="background:LightGrey; color:black"|
Batch size
|style="background:WhiteSmoke; color:black"|
*One sample
|-
| style="background:LightGrey; color:black"|Substrate materials allowed
|style="background:WhiteSmoke; color:black"|
*No restrictions
|-
|}




The Four-Point Probe is a Veeco FPP-5000 for I/V measurement. The main purpose is to measure resistance and resistivity on a 4" silicon wafer. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer.


The wafer are pushed down on the four pins so a measurement is performed. It works only for 4" wafers because a special holder is need. 
[[Image:4pointprobe.jpg|thumb|300x300px|Four point probe: positioned in cleanroom D-3]]


'''The user manual, technical information and contact information can be found in LabManager:'''
'''The user manual, technical information and contact information can be found in LabManager:'''


'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=163 Four point probe]'''
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=343 Probe station]'''

Latest revision as of 15:29, 6 February 2023

Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.

All links to Kemibrug (SDS) and Labmanager Including APV and QC requires login.

Probe station

Probe station. Positioned in serviceroom CX1

Feedback to this page: click here

The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc. It has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected probes. The stage can be moved in x and y to step and repeat a measurement over a large number of chips.

Samples can be inspected by either a microscope and/or a camera.

Two Keithley 2450 source meters are connected to the probe station by triax cables. An additional Keithley 2410 source meter and a Keithley 2000 multi meter is connected by coax cables. All Keithleys can also be connected with banana wires.

Equipment performance and process related parameters

Purpose

Electrical measurements

  • I/V
  • Resistance
  • Data collection by PC possible

Performance

Pad size

  • 100x100µm or more

Substrates

Batch size

  • One sample
Substrate materials allowed
  • No restrictions



The user manual, technical information and contact information can be found in LabManager:

Probe station

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