Specific Process Knowledge/Characterization/Hardness measurement: Difference between revisions

Latest revision as of 12:50, 6 February 2023

Feedback to this page: click here

This page is written by DTU Nanolab internal

Hardness tester

The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into a sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the hardness reliably. Also, the samples must be planar and without large protruding features.

The user manual, technical information and contact information can be found in LabManager:

Equipment info for: Hardness tester

Quality Control - Recipe Parameters and Limits

Quality Control (QC) for the hardness tester

There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. Calibration samples are available in the following three hardnesses: 277 HV, 464 HV and 704 HV. They have been calibrated externally at 1 kgf indentation force and 10 sec indentation time.

Equipment performance and process related parameters

Purpose	Hardness tester	Sample hardness (Vickers) Film hardness (Vickers)
Performance	Available test forces	0,098 N (0,01 kgf) 0,24 N (0,025 kgf) 0,49 N (0,05 kgf) 0,98 N (0,1 kgf) 1,96 N (0,2 kgf) 2,94 N (0,3 kgf) 4,9 N (0,5 kgf) 9,8 N (1 kgf) 19,6 N (2 kgf)
Performance	Data output	Machine can calculate hardness in HV (Hardness Vickers) and show result on display The integrated printer has been disabled (not cleanroom compatible)
Substrates	Batch size	One sample
	Substrate materials allowed	No restrictions (besides sample must be non-toxic, dry and free from chemical residues)
	Calibration samples available	277 HV 1 464 HV 1 704 HV 1

@@ Line 1: / Line 1: @@
-=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
 '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Hardness_measurement click here]'''
+''This page is written by DTU Nanolab  internal''
 ==Hardness tester==
 [[Image:InnovaHardness.jpg|thumb|300x300px|Hardness tester. Positioned in cleanroom F-2]]
-The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into sample using a know indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the large the indentation).
+The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into a sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the hardness reliably. Also, the samples must be planar and without large protruding features.
 '''The user manual, technical information and contact information can be found in LabManager:'''
-'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=xxx Hardness tester]'''
+'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=434 Equipment info for: Hardness tester]'''
 ==Quality Control - Recipe Parameters and Limits==
@@ Line 17: / Line 18: @@
 |-
 |
-The measured standard hardnesses are 2xx HV, 4xx HV and 6xx HV. The QC is performed x times a year.
+There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. Calibration samples are available in the following three hardnesses: 277 HV, 464 HV and 704 HV. They have been calibrated externally at 1 kgf indentation force and 10 sec indentation time.
-*[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1831&mach=xxx The QC procedure]<br>
 |}
 ==Equipment performance and process related parameters==
@@ Line 35: / Line 33: @@
 *Sample hardness (Vickers)
 *Film hardness (Vickers)
 |-
-!style="background:silver; color:black" align="center"|
+!style="background:silver; color:black" align="center" valign="center" rowspan="2"|
 Performance
 |style="background:LightGrey; color:black"|
 Available test forces
 |style="background:WhiteSmoke; color:black"|
 *0,098 N (0,01 kgf)
@@ Line 51: / Line 50: @@
 *19,6 N (2 kgf)
 |-
-!style="background:silver; color:black" align="center" valign="center" rowspan="2"|
+| style="background:LightGrey; color:black"|
+Data output
+|style="background:WhiteSmoke; color:black"|
+*Machine can calculate hardness in HV (Hardness Vickers) and show result on display
+*The integrated printer has been disabled (not cleanroom compatible)
+|-
+|-
+!style="background:silver; color:black" align="center" valign="center" rowspan="3"|
 Substrates
 |style="background:LightGrey; color:black"|
@@ Line 58: / Line 67: @@
 *One sample
 |-
-| style="background:LightGrey; color:black"|Substrate materials allowed
+| style="background:LightGrey; color:black"|
+Substrate materials allowed
+|style="background:WhiteSmoke; color:black"|
+*No restrictions (besides sample must be non-toxic, dry and free from chemical residues)
+|-
+| style="background:LightGrey; color:black"|
+Calibration samples available
 |style="background:WhiteSmoke; color:black"|
-*No restrictions (besides sample must be dry and free from chemical residues)
+*277 HV 1
+*464 HV 1
+*704 HV 1
 |-
 |}