Specific Process Knowledge/Characterization/Hardness measurement: Difference between revisions

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'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Thickness_Measurer click here]'''  
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/Hardness_measurement click here]'''  


==Thickness measurer==
''This page is written by DTU Nanolab  internal''
[[Image:Thicknessmeasurer2007.jpg|thumb|300x300px|Thickness Measurer. Positioned in cleanroom D-3]]


The purpose is to measure the thickness of wafers, depths of larger grooves or height of larger mesas.  
==Hardness tester==
[[Image:InnovaHardness.jpg|thumb|300x300px|Hardness tester. Positioned in cleanroom F-2]]


During a KOH etch it can be helpful to ensure no over-etching by making a thickness measurement during the etching.  
The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into a sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the hardness reliably. Also, the samples must be planar and without large protruding features.




'''The user manual, technical information and contact information can be found in LabManager:'''
'''The user manual, technical information and contact information can be found in LabManager:'''


'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=198 Thickness measurer]'''
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=434 Equipment info for: Hardness tester]'''


==Quality Control - Recipe Parameters and Limits==
==Quality Control - Recipe Parameters and Limits==
{| border="1" cellspacing="2" cellpadding="2" colspan="3"
{| border="1" cellspacing="2" cellpadding="2" colspan="3"
|bgcolor="#98FB98" |'''Quality Control (QC) for the Thickness measurer'''
|bgcolor="#98FB98" |'''Quality Control (QC) for the hardness tester'''
|-
|-
|  
|  
The measured standard thickness is 0.1 mm. The measured result has to be within ± 0.005 mm. The QC is preformed once a year.
There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. Calibration samples are available in the following three hardnesses: 277 HV, 464 HV and 704 HV. They have been calibrated externally at 1 kgf indentation force and 10 sec indentation time.
*[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1831&mach=198 The QC procedure]<br>
*[http://www.labmanager.danchip.dtu.dk/view_binary.php?fileId=2062 The newest QC data]<br>
|}
|}


==Equipment performance and process related parameters==
==Equipment performance and process related parameters==
Line 32: Line 29:
Purpose  
Purpose  
|style="background:LightGrey; color:black"|
|style="background:LightGrey; color:black"|
Hardness measurer
Hardness tester
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Wafer thickness
*Sample hardness (Vickers)
*Depths of larger grooves
*Film hardness (Vickers)
*Heigth of larger mesas
 
|-
|-
!style="background:silver; color:black" align="center"|
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|
Performance
Performance
|style="background:LightGrey; color:black"|
|style="background:LightGrey; color:black"|
Thickness resolution
Available test forces
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*< 5 µm
*0,098 N (0,01 kgf)
*0,24 N (0,025 kgf)
*0,49 N (0,05 kgf)
*0,98 N (0,1 kgf)
*1,96 N (0,2 kgf)
*2,94 N (0,3 kgf)
*4,9 N (0,5 kgf)
*9,8 N (1 kgf)
*19,6 N (2 kgf)
|-
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|
| style="background:LightGrey; color:black"|
Data output
|style="background:WhiteSmoke; color:black"|
*Machine can calculate hardness in HV (Hardness Vickers) and show result on display
*The integrated printer has been disabled (not cleanroom compatible)
|-
 
 
 
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|
Substrates
Substrates
|style="background:LightGrey; color:black"|
|style="background:LightGrey; color:black"|
Line 52: Line 67:
*One sample  
*One sample  
|-
|-
| style="background:LightGrey; color:black"|Substrate materials allowed
| style="background:LightGrey; color:black"|
Substrate materials allowed
|style="background:WhiteSmoke; color:black"|
*No restrictions (besides sample must be non-toxic, dry and free from chemical residues)
|-
| style="background:LightGrey; color:black"|
Calibration samples available
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*No restrictions
*277 HV 1
*464 HV 1
*704 HV 1
|-  
|-  
|}
|}

Latest revision as of 12:50, 6 February 2023

Feedback to this page: click here

This page is written by DTU Nanolab internal

Hardness tester

Hardness tester. Positioned in cleanroom F-2

The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into a sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the hardness reliably. Also, the samples must be planar and without large protruding features.


The user manual, technical information and contact information can be found in LabManager:

Equipment info for: Hardness tester

Quality Control - Recipe Parameters and Limits

Quality Control (QC) for the hardness tester

There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. Calibration samples are available in the following three hardnesses: 277 HV, 464 HV and 704 HV. They have been calibrated externally at 1 kgf indentation force and 10 sec indentation time.

Equipment performance and process related parameters

Purpose

Hardness tester

  • Sample hardness (Vickers)
  • Film hardness (Vickers)

Performance

Available test forces

  • 0,098 N (0,01 kgf)
  • 0,24 N (0,025 kgf)
  • 0,49 N (0,05 kgf)
  • 0,98 N (0,1 kgf)
  • 1,96 N (0,2 kgf)
  • 2,94 N (0,3 kgf)
  • 4,9 N (0,5 kgf)
  • 9,8 N (1 kgf)
  • 19,6 N (2 kgf)

Data output

  • Machine can calculate hardness in HV (Hardness Vickers) and show result on display
  • The integrated printer has been disabled (not cleanroom compatible)

Substrates

Batch size

  • One sample

Substrate materials allowed

  • No restrictions (besides sample must be non-toxic, dry and free from chemical residues)

Calibration samples available

  • 277 HV 1
  • 464 HV 1
  • 704 HV 1
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