Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry: Difference between revisions

From LabAdviser
Jmli (talk | contribs)
No edit summary
Jmli (talk | contribs)
No edit summary
 
(One intermediate revision by the same user not shown)
Line 2: Line 2:


==Atomika SIMS  '''NO LONGER AVAILABLE''' ==
==Atomika SIMS  '''NO LONGER AVAILABLE''' ==
{{template:jmli1}}
{{Template:Author-jmli1}}


'''We have decommissioned the SIMS we had at DTU Nanolab. We can guide you to another site for SIMS analysis, take a look here: [http://www.eag.com/secondary-ion-mass-spectrometry-sims/].'''
'''We have decommissioned the SIMS we had at DTU Nanolab. We can guide you to another site for SIMS analysis, take a look here: [http://www.eag.com/secondary-ion-mass-spectrometry-sims/].'''


The SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined..
The SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined..

Latest revision as of 08:54, 3 February 2023

Feedback to this page: click here

Atomika SIMS NO LONGER AVAILABLE

Unless otherwise stated, all content on this page was created by Jonas Michael-Lindhard, DTU Nanolab

We have decommissioned the SIMS we had at DTU Nanolab. We can guide you to another site for SIMS analysis, take a look here: [1].

The SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined..