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| '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SIMS:_Secondary_Ion_Mass_Spectrometry click here]''' | | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Characterization/SIMS:_Secondary_Ion_Mass_Spectrometry click here]''' |
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| | ==Atomika SIMS '''NO LONGER AVAILABLE''' == |
| | {{Template:Author-jmli1}} |
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| ==Atomika SIMS==
| | '''We have decommissioned the SIMS we had at DTU Nanolab. We can guide you to another site for SIMS analysis, take a look here: [http://www.eag.com/secondary-ion-mass-spectrometry-sims/].''' |
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| [[Image:Equipment_SIMS.jpg|300x300px|thumb|Atomika SIMS: positioned in the basement of building 346 (underneath the cleanroom).]]
| | The SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined.. |
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| The Atomika SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined. | |
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| Please note that no user will be instructed on the SIMS. Danchip staff will run your samples.
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| '''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:'''
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| [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&page_id=169 The Atomika SIMS in Labmanager]
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| ==An overview of the performance of the SIMS==
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| {| border="2" cellspacing="0" cellpadding="10"
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| !style="background:silver; color:black;" align="left"|Purpose
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| |style="background:LightGrey; color:black"| Determination of atomic composition
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| |style="background:WhiteSmoke; color:black"|
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| * Doping level
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| * Sample contamination
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| !style="background:silver; color:black" align="left"|Performance
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| |style="background:LightGrey; color:black"|Measurement accuracy depends on
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| |style="background:WhiteSmoke; color:black"|
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| * Which atoms to be analysed
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| * The sample morphology (flat samples are much more suited than particles)
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| !style="background:silver; color:black" align="left" rowspan="3"|Process parameters
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| |style="background:LightGrey; color:black"| Ion gun parameters
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| |style="background:WhiteSmoke; color:black"|
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| * Acceleration voltage, lens parameters
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| * Gas inlet pressures, apertures,
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| !style="background:silver; color:black" align="left" rowspan="3" |Sample requirements
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| |style="background:LightGrey; color:black"|Substrate material allowed
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| |style="background:WhiteSmoke; color:black"|
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| *In principle all materials
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| |style="background:LightGrey; color:black"|Substrate size
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| |style="background:WhiteSmoke; color:black"|
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| * The samples must be cut into 5x5 or 7x7 mm pieces
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| * Other types of samples must be mounted onto appropriately sized carriers
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| |style="background:LightGrey; color:black"|Batch size
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| |style="background:WhiteSmoke; color:black"|
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| * The sample holder carries up to 6 samples at the time
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| |}
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Feedback to this page: click here
Atomika SIMS NO LONGER AVAILABLE
Unless otherwise stated, all content on this page was created by Jonas Michael-Lindhard, DTU Nanolab
We have decommissioned the SIMS we had at DTU Nanolab. We can guide you to another site for SIMS analysis, take a look here: [1].
The SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined..
