Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/nanoetch/180nmzep: Difference between revisions

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<gallery caption="The profiles of the 180 nm zep resist" widths="250" heights="200" perrow="3">
<gallery caption="The profiles of the 180 nm zep resist" widths="250" heights="200" perrow="3">

Latest revision as of 15:05, 2 February 2023

Feedback to this page: click here Unless otherwise stated, all content on this page was created by Jonas Michael-Lindhard, DTU Nanolab

  • The profiles of the 180 nm zep resist
  • The 30 nm zep profile
    The 30 nm zep profile
  • The 60 nm zep profile
    The 60 nm zep profile
  • The 90 nm zep profile
    The 90 nm zep profile
  • The 120 nm zep profile
    The 120 nm zep profile
  • The 150 nm zep profile
    The 150 nm zep profile
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