Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/Lasers sources: Difference between revisions
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'''Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.''' | |||
== Laser sources == | == Laser sources == | ||
The laser micromachining tool is equipped with two laser sources (1) picosecond laser (TBW) and (2) a nanosecond laser (IPG). The technical | The laser micromachining tool is equipped with two laser sources (1) a picosecond laser (TBW) and (2) a nanosecond laser (IPG). The technical specifications provided by the supplier 3D micromac are shown below. Refer to the [[Specific_Process_Knowledge/Back-end_processing/Laser_Micromachining_Tool#Performances/|Performances]] to know the measured values of the output power. From 1st of Mar 2017 only the pico second laser is available \ rkch. | ||
=== Specifications from 3D micromac === | === Specifications from 3D micromac === | ||
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|style="background:LightGrey; color:black"|Pulse duration | |style="background:LightGrey; color:black"|Pulse duration | ||
|style="background:WhiteSmoke; color:black"| 10ps | |style="background:WhiteSmoke; color:black"| 10ps | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| 100ns | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Repetition rate | |style="background:LightGrey; color:black"|Repetition rate | ||
|style="background:WhiteSmoke; color:black"| 200 kHz up to 8000 kHz software controlled | |style="background:WhiteSmoke; color:black"| 200 kHz up to 8000 kHz software controlled | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| 100kHz | ||
|- | |- | ||
|style="background:LightGrey; color:black"|Output power | |style="background:LightGrey; color:black"|Output power |
Latest revision as of 08:52, 1 February 2023
Unless anything else is stated, everything on this page, text and pictures are made by DTU Nanolab.
Laser sources
The laser micromachining tool is equipped with two laser sources (1) a picosecond laser (TBW) and (2) a nanosecond laser (IPG). The technical specifications provided by the supplier 3D micromac are shown below. Refer to the Performances to know the measured values of the output power. From 1st of Mar 2017 only the pico second laser is available \ rkch.
Specifications from 3D micromac
Picosecond (TBW) | Nanosecond (IPG) | |
Wavelength | 1064nm, 532nm, 355nm | 1064nm |
Pulse duration | 10ps | 100ns |
Repetition rate | 200 kHz up to 8000 kHz software controlled | 100kHz |
Output power | > 50 W @ 1064 nm | 100 W |
Warm-up time | 25min | none |