Latest revision as of 15:00, 24 August 2021

XPS analysis of ALD deposited layers

This section assumes that you are familiar with the basic operations of data processing in Avantage. If not, then press HERE and go through this part first.

This is an analysis of ALD deposited layers: A silicon wafer has been coated with with 15 nm Al₂O₃, 15 nm of TiO₂ and 16 nm of HfO₂. In the XPS an experiment with three points of analysis has been set up to analyse this sandwiched structure:

Point: snapshot
1. Depth profile: 2keVHigh20secs
  1. Hf4f Snap
  2. Al2p Snap
  3. Si2p Snap
  4. C1s Snap
  5. Ti2p Snap
  6. O1s Snap
Point: Scanned
1. Depth profile: 2keVHigh20secs
  1. XPS survey
  2. Hf4f Scan
  3. Al2p Scan
  4. Si2p Scan
  5. C1s Scan
  6. Ti2p Scan
  7. O1s Scan
Point: Extended +20eV end, 0.2 eV step
1. Depth profile: 2keVHigh20secs
  1. XPS survey
  2. Hf4f Scan
  3. Al2p Scan
  4. Si2p Scan
  5. C1s Scan
  6. Ti2p Scan
  7. O1s Scan

The three points are distributed in such a way on the sample holder plate as to minimise the redeposition of one depth profile onto another. They serve different purposes:

The second point labelled 'Scanned' is the slow and time consuming analysis using scanned spectra and includes survey spectra. It will take roughly 7.5 hours to do 35 levels.
The first point labelled 'snapshot' only records the fast snapshots (no survey) and therefore only takes about 30 minutes. The question is if one can obtain the same information as the scanned version.
The last point labelled 'Extended +20eV end, 0.2 eV step' is intended to be used for Quases analysis.

Guidelines on data processing

Click HERE to see some general guidelines on data processing in Avantage.

How to get the data used in the example below

The wiki does not allow uploading of *.zip data files so the zipped data file has been renamed to a *.xls file. Therefore, do the following:

Download this File:Experiment 2.xls.
Rename the downloaded file Experiment_2.xls to Experiment_2.zip
Extract to a folder on a local drive (right click and select 'Extract all'). Avantage will not work on network drives.

@@ Line 1: / Line 1: @@
+<!--Checked for updates on 24/8-2021. ok/ jmli-->
 = XPS analysis of ALD deposited layers =
 This section assumes that you are familiar with the basic operations of data processing in Avantage. If not, then press [[Specific Process Knowledge/Characterization/XPS/Processing/Basics|'''HERE''']] and go through this part first.
+This is an analysis of ALD deposited layers: A silicon wafer has been coated with with 15 nm Al<sub>2</sub>O<sub>3</sub>, 15 nm of TiO<sub>2</sub> and 16 nm of HfO<sub>2</sub>. In the XPS an experiment with three points of analysis has been set up to analyse this sandwiched structure:
+# Point: snapshot
+## Depth profile: 2keVHigh20secs
+### Hf4f Snap
+### Al2p Snap
+### Si2p Snap
+### C1s Snap
+### Ti2p Snap
+### O1s Snap
+# Point: Scanned
+## Depth profile: 2keVHigh20secs
+### XPS survey
+### Hf4f Scan
+### Al2p Scan
+### Si2p Scan
+### C1s Scan
+### Ti2p Scan
+### O1s Scan
+# Point: Extended +20eV end, 0.2 eV step
+## Depth profile: 2keVHigh20secs
+### XPS survey
+### Hf4f Scan
+### Al2p Scan
+### Si2p Scan
+### C1s Scan
+### Ti2p Scan
+### O1s Scan
+The three points are distributed in such a way on the sample holder plate as to minimise the redeposition of one depth profile onto another. They serve different purposes:
+* The second point labelled 'Scanned' is the slow and time consuming analysis using scanned spectra and includes survey spectra. It will take roughly 7.5 hours to do 35 levels.
+* The first point labelled 'snapshot' only records the fast snapshots (no survey) and therefore only takes about 30 minutes. The question is if one can obtain the same information as the scanned version.
+* The last point labelled 'Extended +20eV end, 0.2 eV step' is intended to be used for Quases analysis.
 == Guidelines on data processing ==
@@ Line 13: / Line 49: @@
 = Data processing  =
-==== [[Specific Process Knowledge/Characterisation/XPS/Processing/ALDSandwich1/1Open| Open the experiment and prepare processing grids]] ====
+==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/1Open|1. Open the experiment and prepare processing grids]] ====
-Double click on the ''Experiment 2.VGX'' file and Avantage should start. If you open from Avantage, remember to select 'All files *.*' to be able to find the *.VGX file.
-[[File:ALD-Sandwich-01.jpg|700px]]
-The experiment has three points. Here, we will process the data in the 'Scanned' point. Minimize the other points and open a new processing grid.
-[[File:ALD-Sandwich-03.jpg|700px]]
-Click on the point in the experiment tree and drag the content into the processing grid.
-[[File:ALD-Sandwich-04a.jpg|700px]]
-This action will create a grid with all spectra. Here, however, we will remove the survey spectrum from the processing grid by deleting it (keep in mind always to separate processing grids for [[Specific Process Knowledge/Characterization/XPS/Processing/Guidelines|survey spectra, scanned and snapshot spectra]]).
-[[File:ALD-Sandwich-06.jpg|700px]]
-Rearrange the scanned spectra in the processing grid (Here called 'Data Grid2') with the button highlighted to the right.
-[[File:ALD-Sandwich-09a.jpg|700px]]
-Open a new processing grid for the survey spectra, drag the spectra over there and remove the remaining empty grids. Here, the processing grid is called 'Data Grid3'.
-[[File:ALD-Sandwich-12.jpg|700px]]
+==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/2Survey|2. Survey spectra processing]] ====
-Now, we have two processing grids ready for analysis.
+==== [[Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1/3scanned|3. High resolution scan processing]]====