Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/nanoetch/180nmzep: Difference between revisions
No edit summary |
No edit summary |
||
Line 1: | Line 1: | ||
'''Feedback to this page''': '''[mailto:labadviser@ | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/ICP_Metal_Etcher/silicon/nano/nanoetch/180nmzep click here]''' | ||
<!--Checked for updates on 30/7-2018 - ok/jmli --> | <!--Checked for updates on 30/7-2018 - ok/jmli --> | ||
<!--Checked for updates on 5/10-2020 - ok/jmli --> | |||
<gallery caption="The profiles of the 180 nm zep resist" widths="250" heights="200" perrow="3"> | <gallery caption="The profiles of the 180 nm zep resist" widths="250" heights="200" perrow="3"> |
Revision as of 07:32, 5 October 2020
Feedback to this page: click here
-
The 30 nm zep profile
-
The 60 nm zep profile
-
The 90 nm zep profile
-
The 120 nm zep profile
-
The 150 nm zep profile