Specific Process Knowledge/Thin film deposition/DiamondCVD: Difference between revisions
(Added alt text. Added more info) |
(adding info from power point slides made by Pernille and Kristian) |
||
Line 12: | Line 12: | ||
[http://labmanager.nanolab.dtu.dk/function.php?module=Machine&view=view&mach=397 Diamond CVD in LabManager] | [http://labmanager.nanolab.dtu.dk/function.php?module=Machine&view=view&mach=397 Diamond CVD in LabManager] | ||
== | <br clear="all" /> | ||
==Single crystal diamond growth== | |||
[[File:diamond bonds.png|upright=2.5|alt=3D-image of the Diamond crystal lattice. Each carbon atom is bound to the four nearest carbon atoms via sp3 hybridization. On the left you see an extended diamond lattice. On the right you see a carbon atom with four sp3 hybrid orbital lobes extending from the center with an angle of 109.5 degrees between the lobes. |right|thumb|Diamond bonding]] | |||
[[File:diamond growth.png|upright=2|alt=Structural formula diagrams of the growing diamond lattice showing how a hydrogen radical knocks off a hydrogen atom that terminates the diamond lattice, then a methane radical attaches to the activated site. The same thing happens at an adjacent site and finally one hydrogen radical after another knock off two hydrogen atoms on the recently-attached methane sites to create a new single carbon-carbon bond. The two new carbon atoms are also still bound to two hydrogen atoms each.|left|thumb|Structural formula diagrams of diamond growth]] | |||
Diamond is grown by depositing carbon from the CH4 on a substrate. If the carbon forms an sp3 bond to other carbon atoms, diamond is grown – Otherwise it will be etched away by a high concentration of H2. | |||
It is possible to grow extremely clean single crystal diamond in the SEKI system. It is also possible to control the N<sub>2</sub> dopant level and dopant depth. Nitrogen doping affects the optical and electronic properties of the diamond. For instance this can be used in magnetic sensors, which is a topic of research at DTU Physics. | |||
== Polycrystalline diamond growth == | |||
[[File:diamond example.png|upright=2.5|alt=Two-inch wafer that has a speckled dark gray appearance with three small transparent partly overlapping squares in one area on top. The wafer is labeled as "polycrystalline diamond substrate" and the squares are labeled as "single crystal diamond" |right|thumb|Single- and polycrystalline diamond]] | [[File:diamond example.png|upright=2.5|alt=Two-inch wafer that has a speckled dark gray appearance with three small transparent partly overlapping squares in one area on top. The wafer is labeled as "polycrystalline diamond substrate" and the squares are labeled as "single crystal diamond" |right|thumb|Single- and polycrystalline diamond]] | ||
For polycrystalline growth, the substrate must be seeded with diamonds. This is commonly done by sonicating the substrate in a solution of water with nano diamonds. After sonication the substrate is rinsed in water and blow-dried. | For polycrystalline growth, the substrate must be seeded with diamonds. This is commonly done by sonicating the substrate in a solution of water with nano diamonds. After sonication the substrate is rinsed in water and blow-dried. | ||
Polishing is needed after deposition if the polycrystalline diamond layer has to be smooth. Thinning is needed if the diamond layer has to be very thin as a uniform diamond layer can only be deposited above 1 μm thickness. | |||
Just as for single crystal diamond growth, it is possible to grow very pure polycrystalline layers with controlled N<sub>2</sub> doping. | |||
<br clear="all" /> | |||
==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||
Line 63: | Line 78: | ||
700-900 °C | 700-900 °C | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process | |||
|style="background:LightGrey; color:black"|Growth rate | |||
|style="background:WhiteSmoke; color:black"| | |||
About 8 Å/s (3 μm/hr) | |||
|- | |||
| style="background:LightGrey; color:black"|Max thickness | |||
|style="background:WhiteSmoke; color:black"| | |||
About 100 μm | |||
|- | |||
| style="background:LightGrey; color:black"|Uniformity | |||
|style="background:WhiteSmoke; color:black"| | |||
OK up to 50 mm diameter <br/> | |||
1 μm thickness needed to ensure substrate coverage | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||
|style="background:LightGrey; color:black"|Substrate size | |style="background:LightGrey; color:black"|Substrate size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
up to 100 mm wafers, 50 mm | up to 100 mm wafers, 50 mm preferred | ||
|- | |- | ||
| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials |
Revision as of 22:44, 4 August 2020
Feedback to this page: click here
THIS PAGE IS UNDER CONSTRUCTION
SEKI Diamond CVD
The SEKI AX5250S is a Microwave Plasma Chemical Vapor Deposition (MPCVD) system for growth of diamond thin films. The system is fitted with gases for diamond growth, which are hydrogen, methane, and oxygen. Depending on the starting material both polycrystalline and single crystalline diamond can be grown. Diamond has a lattice constant of 3.567 Å, which is not easily matched to other materials, and therefore in general diamond growth must be seeded by diamond as nucleation sites. For single crystalline diamond this means that diamond layers in most cases must be grown on top of single crystal diamonds. For polycrystalline diamond, almost any material (which can handle 800 °C) will do. It just needs to be seeded with nano diamonds. The seeding can happen by immersion into solution, by polishing, or by spray coating with nano diamonds.
The user manual, APV, technical information, and contact information can be found in LabManager:
Single crystal diamond growth
Diamond is grown by depositing carbon from the CH4 on a substrate. If the carbon forms an sp3 bond to other carbon atoms, diamond is grown – Otherwise it will be etched away by a high concentration of H2.
It is possible to grow extremely clean single crystal diamond in the SEKI system. It is also possible to control the N2 dopant level and dopant depth. Nitrogen doping affects the optical and electronic properties of the diamond. For instance this can be used in magnetic sensors, which is a topic of research at DTU Physics.
Polycrystalline diamond growth
For polycrystalline growth, the substrate must be seeded with diamonds. This is commonly done by sonicating the substrate in a solution of water with nano diamonds. After sonication the substrate is rinsed in water and blow-dried.
Polishing is needed after deposition if the polycrystalline diamond layer has to be smooth. Thinning is needed if the diamond layer has to be very thin as a uniform diamond layer can only be deposited above 1 μm thickness.
Just as for single crystal diamond growth, it is possible to grow very pure polycrystalline layers with controlled N2 doping.
Equipment | SEKI AX5250S | |
---|---|---|
Purpose | Diamond growth |
|
Parameters |
H2 |
1000 sccm |
CH4 |
50 sccm | |
O2 |
20 sccm | |
Operating pressure |
>200 Torr | |
Power |
5000 W | |
Temperature |
700-900 °C | |
Process | Growth rate |
About 8 Å/s (3 μm/hr) |
Max thickness |
About 100 μm | |
Uniformity |
OK up to 50 mm diameter | |
Substrates | Substrate size |
up to 100 mm wafers, 50 mm preferred |
Allowed materials |
Ask |