Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
Jump to navigation
Jump to search
| Line 37: | Line 37: | ||
<gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2"> | <gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2"> | ||
image:Process A SPTS.png | Recorded with the SPTS software | image:Process A SPTS.png | Left: Recorded with the SPTS software | ||
image:Process A pico.png | Recorded with the Picoscope | image:Process A pico.png | Right: Recorded with the Picoscope | ||
</gallery> | </gallery> | ||
<gallery caption="4 cycles of Process D4 " widths="400" heights="500" perrow="2"> | <gallery caption="4 cycles of Process D4 " widths="400" heights="500" perrow="2"> | ||
Image:PrD4 SPTS.png | Recorded with the SPTS software | Image:PrD4 SPTS.png | Left: Recorded with the SPTS software | ||
Image:PrD4 pico.png |Recorded with the Picoscope | Image:PrD4 pico.png | Right: Recorded with the Picoscope | ||
</gallery> | </gallery> | ||
Revision as of 13:16, 17 March 2020
Process optimization using the Picoscope
The original standard recipes on Pegasus 1 differ in many ways. The second step of one of them is listed below:
| Process A Step 2 parameters | ||
|---|---|---|
| Parameter | Etch | Dep |
| Gas flow (sccm) | SF6 350 (1.5 s), 550 | C4F8 200 |
| Cycle time (secs) | 7.0 | 4.0 |
| Pressure (mtorr) | 25 (1.5 s), 150 | 25 |
| Coil power (W) | 2800 | 2000 |
| Platen power (W) | 140 (1.5) 45 | 0 |
| Common | Temperature 20 degs | |
- 4 cycles of Process A
Left: Recorded with the SPTS software
Right: Recorded with the Picoscope
- 4 cycles of Process D4
Left: Recorded with the SPTS software
Right: Recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the SPTS software
4 cycles of the recipe Prcocess A recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the SPTS software