Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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| Line 13: | Line 13: | ||
|- | |- | ||
! Gas flow (sccm) | ! Gas flow (sccm) | ||
| SF<sub>6</sub> 350 (1.5 s) 550 | | SF<sub>6</sub> 350 (1.5 s), 550 | ||
| C<sub>4</sub>F<sub>8</sub> 200 | | C<sub>4</sub>F<sub>8</sub> 200 | ||
|- | |- | ||
| Line 21: | Line 21: | ||
|- | |- | ||
! Pressure (mtorr) | ! Pressure (mtorr) | ||
| 25 (1.5 s) 150 | | 25 (1.5 s), 150 | ||
| 25 | | 25 | ||
|- | |- | ||
| Line 31: | Line 31: | ||
| 140 (1.5) 45 | | 140 (1.5) 45 | ||
| 0 | | 0 | ||
|- | |- | ||
! Common | ! Common | ||
| colspan="2" | Temperature 20 degs | | colspan="2" | Temperature 20 degs | ||
|- | |- | ||
|} | |} | ||
Revision as of 13:11, 17 March 2020
Process optimization using the Picoscope
The original standard recipes on Pegasus 1 differ in many ways. The second step of one of them is listed below:
| Process A Step 2 parameters | ||
|---|---|---|
| Parameter | Etch | Dep |
| Gas flow (sccm) | SF6 350 (1.5 s), 550 | C4F8 200 |
| Cycle time (secs) | 7.0 | 4.0 |
| Pressure (mtorr) | 25 (1.5 s), 150 | 25 |
| Coil power (W) | 2800 | 2000 |
| Platen power (W) | 140 (1.5) 45 | 0 |
| Common | Temperature 20 degs | |
- 4 cycles of Process A
Recorded with the SPTS software
Recorded with the Picoscope
- 4 cycles of Process D4
Recorded with the SPTS software
Recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the SPTS software
4 cycles of the recipe Prcocess A recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the SPTS software