Revision as of 13:09, 17 March 2020

Process optimization using the Picoscope

The original standard recipes on Pegasus 1 differ in many ways. The second step of one of them is listed below:

Process A parameters
Step 2
Parameter	Etch	Dep
Gas flow (sccm)	SF₆ 350 (1.5 s) 550	C₄F₈ 200
Cycle time (secs)	7.0	4.0
Pressure (mtorr)	25 (1.5 s) 150	25
Coil power (W)	2800	2000
Platen power (W)	140 (1.5) 45	0
Cycles	44 (vary this)
Common	Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers

4 cycles of the recipe PrD4 recorded with the Picoscope

4 cycles of the recipe PrD4 recorded with the SPTS software

4 cycles of the recipe Prcocess A recorded with the Picoscope

4 cycles of the recipe PrD4 recorded with the SPTS software

@@ Line 1: / Line 1: @@
 = Process optimization using the Picoscope =
-The Pegasus tools were delivered with a set of standard recipes
+The original standard recipes on Pegasus 1 differ in many ways. The second step of one of them is listed below:
+{| {{table}}
+{| border="1" cellspacing="1" cellpadding="2"  align="center" style="width:500px"
+! colspan="3" |Process A parameters
+|-
+! colspan="2" | Step 2
+|-
+! width="120" | Parameter
+! width="120" | Etch
+! width="120" | Dep
+|-
+! Gas flow (sccm)
+| SF<sub>6</sub> 350 (1.5 s) 550
+| C<sub>4</sub>F<sub>8</sub> 200
+|-
+! Cycle time (secs)
+| 7.0
+| 4.0
+|-
+! Pressure (mtorr)
+| 25 (1.5 s) 150
+| 25
+|-
+! Coil power (W)
+| 2800
+| 2000
+|-
+! Platen power (W)
+| 140 (1.5) 45
+| 0
+|-
+! Cycles
+| colspan="2" | 44 (vary this)
+|-
+! Common
+| colspan="2" | Temperature 20 degs, HBC 10 torr, Short funnel, with baffle & 5mm spacers
+|-
+|}
 <gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2">