Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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The Pegasus tools were delivered with a set of standard recipes | The Pegasus tools were delivered with a set of standard recipes | ||
<gallery caption="4 cycles of Process A " widths=" | <gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2"> | ||
image:Process A SPTS.png | Recorded with the SPTS software | image:Process A SPTS.png | Recorded with the SPTS software | ||
image:Process A pico.png | Recorded with the Picoscope | image:Process A pico.png | Recorded with the Picoscope | ||
Revision as of 12:41, 17 March 2020
Process optimization using the Picoscope
The Pegasus tools were delivered with a set of standard recipes
- 4 cycles of Process A
Recorded with the SPTS software
Recorded with the Picoscope
- 4 cycles of Process D4
Recorded with the SPTS software
Recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the SPTS software
4 cycles of the recipe Prcocess A recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the SPTS software