Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
Jump to navigation
Jump to search
No edit summary |
|||
| Line 3: | Line 3: | ||
The Pegasus tools were delivered with a set of standard recipes | The Pegasus tools were delivered with a set of standard recipes | ||
[[Image:PrD4 pico.png |frame|right| | [[Image:PrD4 pico.png |frame|right|x500px|4 cycles of the recipe PrD4 recorded with the Picoscope]] | ||
[[Image:PrD4 SPTS.png |frame|left| | [[Image:PrD4 SPTS.png |frame|left|x500px|4 cycles of the recipe PrD4 recorded with the SPTS software]] | ||
[[Image:Process A pico.png |frame|right| | [[Image:Process A pico.png |frame|right|x500px|4 cycles of the recipe Prcocess A recorded with the Picoscope]] | ||
[[Image:Process A SPTS.png |frame|left| | [[Image:Process A SPTS.png |frame|left|x500px|4 cycles of the recipe PrD4 recorded with the SPTS software]] | ||
Revision as of 12:31, 17 March 2020
Process optimization using the Picoscope
The Pegasus tools were delivered with a set of standard recipes
4 cycles of the recipe PrD4 recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the SPTS software
4 cycles of the recipe Prcocess A recorded with the Picoscope
4 cycles of the recipe PrD4 recorded with the SPTS software