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The FEI AFEG 250 FEG is a field emission scanning electron microscope with a spatial resolution of 2 nm for the ETD detector in high vacuum at 30 keV. The microscope can operate in high vacuum or low vacuum at room temperature. Our AFEG is fitted with EDS and WDS detectors, which allows for analytical measurements.
 
== Process information ==
 
*'''Electron source'''
Field emission gun
*'''Accelerating voltage'''
500 V- 30 kV
*'''Resolution'''
2 nm at 30 kV (SE)
*'''Imaging detectors'''
Everhart-Thornley (SE/BSE), Solid State BSE, Large Field, Gaseous SE, Gaseous BSE, Gaseous Analytical, STEM, vCD and CCD Camera
*'''Imaging modes'''
High and low vacuum (130 Pa).
*'''Analytical capabilities'''
Energy dispersive X-rays (Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV)
Wave Dispersive Spectrometer
 
 
==Equipment performance and process related parameters==
{| border="2" cellspacing="0" cellpadding="0"
!colspan="2" border="none" style="background:silver; color:black;" align="center |Equipment
|style="background:WhiteSmoke; color:black" align="center"|FEI QFEG 200 Cryo ESEM
|-
!style="background:silver; color:black;" align="center" width="60"| Purpose
|style="background:LightGrey; color:black" "rowspan="2"| Vizualization and Microanalysis
|style="background:WhiteSmoke; color:black"|
* Vizualization of surfaces (topography and Z contrast)
* Vizualization of projected image (BF STEM image)
* Energy Dispersive X-ray analysis
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance
|style="background:LightGrey; color:black" rowspan="2"|Resolution
|style="background:Whitesmoke; color:black" colspan="1" align="left"|The resolution of QFEG dependends on the sample and the operation mode!
|-
|style="background:WhiteSmoke; color:black"|
* 2 nm at 30 keV for Au on C sample with the ETD detector
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="7"|Instrument specifics
|style="background:LightGrey; color:black"|Detectors
|style="background:WhiteSmoke; color:black"|
* ETD- Everhart-Thornley for secondary electrons
* BSD- Solid state Back Scattered Detector
* LFD- Large Field Detector for secondary electrons
* GSED- Gaseous Secondary Electron Detector
* GBSD- Gaseous Backscattered Electron Detector
* GAD- Gaseous Analystical Detector
* STEM- right field Scanning Tramission Electron detector
* vCD- low voltage BSED
* CCD camera
|-
|style="background:LightGrey; color:black"|Electron source
|style="background:WhiteSmoke; color:black"|
* Field Emission - Tungsten filament
|-
|style="background:LightGrey; color:black"|Stage (room temperature)
|style="background:WhiteSmoke; color:black"|
* X, Y: 25 &times; 25 mm
* T: 0 to 60<sup>o</sup> (Full tilt require removment of cryo cold trap.)
* R: 360<sup>o</sup>
|-
|style="background:LightGrey; color:black"|WDS
|style="background:WhiteSmoke; color:black"|
* Oxford Instruments Wavelength Dispersive Spectroscopy
|-
|style="background:LightGrey; color:black"|EDS
|style="background:WhiteSmoke; color:black"|
* Oxford Instruments 50 mm<sup>2</sup> X-Max silicon drift detector, MnKα resolution at 124 eV
|-
|style="background:LightGrey; color:black"|Operating pressures
|style="background:WhiteSmoke; color:black"|
* High vacuum (10<sup>-4</sup> Pa), Low vacuuml mode (up to 130Pa)
|-
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
|style="background:LightGrey; color:black"|Sample sizes
|style="background:WhiteSmoke; color:black"|
* No actual limit (limitted by stage movment and detector position).
|-
| style="background:LightGrey; color:black"|Allowed materials
|style="background:WhiteSmoke; color:black"|
* Conductors, Semiconductors,Insulators,Wet Samples, Biological (not pathogents!)
|-
|}

Latest revision as of 09:06, 16 March 2020

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The FEI AFEG 250 FEG is a field emission scanning electron microscope with a spatial resolution of 2 nm for the ETD detector in high vacuum at 30 keV. The microscope can operate in high vacuum or low vacuum at room temperature. Our AFEG is fitted with EDS and WDS detectors, which allows for analytical measurements.

Process information

  • Electron source

Field emission gun

  • Accelerating voltage

500 V- 30 kV

  • Resolution

2 nm at 30 kV (SE)

  • Imaging detectors

Everhart-Thornley (SE/BSE), Solid State BSE, Large Field, Gaseous SE, Gaseous BSE, Gaseous Analytical, STEM, vCD and CCD Camera

  • Imaging modes

High and low vacuum (130 Pa).

  • Analytical capabilities

Energy dispersive X-rays (Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV) Wave Dispersive Spectrometer


Equipment performance and process related parameters

Equipment FEI QFEG 200 Cryo ESEM
Purpose Vizualization and Microanalysis
  • Vizualization of surfaces (topography and Z contrast)
  • Vizualization of projected image (BF STEM image)
  • Energy Dispersive X-ray analysis
Performance Resolution The resolution of QFEG dependends on the sample and the operation mode!
  • 2 nm at 30 keV for Au on C sample with the ETD detector
Instrument specifics Detectors
  • ETD- Everhart-Thornley for secondary electrons
  • BSD- Solid state Back Scattered Detector
  • LFD- Large Field Detector for secondary electrons
  • GSED- Gaseous Secondary Electron Detector
  • GBSD- Gaseous Backscattered Electron Detector
  • GAD- Gaseous Analystical Detector
  • STEM- right field Scanning Tramission Electron detector
  • vCD- low voltage BSED
  • CCD camera
Electron source
  • Field Emission - Tungsten filament
Stage (room temperature)
  • X, Y: 25 × 25 mm
  • T: 0 to 60o (Full tilt require removment of cryo cold trap.)
  • R: 360o
WDS
  • Oxford Instruments Wavelength Dispersive Spectroscopy
EDS
  • Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV
Operating pressures
  • High vacuum (10-4 Pa), Low vacuuml mode (up to 130Pa)
Substrates Sample sizes
  • No actual limit (limitted by stage movment and detector position).
Allowed materials
  • Conductors, Semiconductors,Insulators,Wet Samples, Biological (not pathogents!)
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