Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/SIMS settings: Difference between revisions
No edit summary |
No edit summary |
||
| Line 1: | Line 1: | ||
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/SIMS_settings click here]''' | '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/IBE⁄IBSD_Ionfab_300/SIMS_settings click here]''' | ||
''Made by bge@danchip in 2015'' | |||
{| border="1" style="text-align: center; width: 320px; height: 200px;" | {| border="1" style="text-align: center; width: 320px; height: 200px;" | ||
|- | |- | ||
Revision as of 08:29, 29 June 2017
Feedback to this page: click here
Made by bge@danchip in 2015
| SIMS setting for different materials | ||
| Lower plate | Upper plate | |
|---|---|---|
| Ti | -1 | |
| Si | -1 | (2) |
| Al | -1 | 1 |
| Cr | -1 | |
| Ni | -6 | |