Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AZO deposition using ALD: Difference between revisions

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<b>How to fill out the process log in LabManager:</b>
<b>How to fill out the process log in LabManager:</b>
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The pulse time for each precursor equals the total pulse time times the number of cycles in each macrocycle.
The pulse time for each precursor equals the total pulse time times the number of cycles in each macrocycle.


DEZ pulse time: (0.1 + 0.1) s * 19 = 3.8 s  
<strong>DEZ</strong> pulse time: (0.1 + 0.1) s * 19 = <strong>3.8 s</strong>


TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s
<strong>TMA</strong> pulse time: (0.1 + 0.1 )s * 1 = <strong>0.2 s</strong>


H<sub>2</sub>O pulse time: [(0.1 + 0.1) s * 19] + [(0.1 + 0.1) s * 1] = 4.0 s
<strong>H<sub>2</sub>O</strong> pulse time: [(0.1 + 0.1) s * 19] + [(0.1 + 0.1) s * 1] = <strong>4.0 s</strong>


The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>).
The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>).


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<b>Recipe: AZO 25T</b>
<b>Recipe: AZO 25T</b>
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<b>How to fill out the process log in LabManager:</b>
<b>How to fill out the process log in LabManager:</b>
Line 136: Line 135:
The pulse time for each precursor equals the total pulse time times the number of cycles in each macrocycle.
The pulse time for each precursor equals the total pulse time times the number of cycles in each macrocycle.


DEZ pulse time: (0.1 + 0.1) s * 24 = 4.8 s  
<strong>DEZ</strong> pulse time: (0.1 + 0.1) s * 24 = <strong>4.8 s</strong>


TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s
<strong>TMA</strong> pulse time: (0.1 + 0.1 )s * 1 = <strong>0.2 s</strong>


H<sub>2</sub>O pulse time: [(0.1 + 0.1) s * 24] + [(0.1 + 0.1) s * 1] = 5.0 s
<strong>H<sub>2</sub>O</strong> pulse time: [(0.1 + 0.1) s * 24] + [(0.1 + 0.1) s * 1] = <strong>5.0 s</strong>


The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>).
The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>).


 
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<b>Recipe: AZO 30T</b>
<b>Recipe: AZO 30T</b>
Line 207: Line 206:
The pulse time for each precursor equals the total pulse time times the number of cycles in each macrocycle.
The pulse time for each precursor equals the total pulse time times the number of cycles in each macrocycle.


DEZ pulse time: (0.1 + 0.1) s * 29 = 5.8 s  
<strong>DEZ</strong> pulse time: (0.1 + 0.1) s * 29 = <strong>5.8 s</strong>


TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s
<strong>TMA</strong> pulse time: (0.1 + 0.1 )s * 1 = <strong>0.2 s</strong>


H<sub>2</sub>O pulse time: [(0.1 + 0.1) s * 29] + [(0.1 + 0.1) s * 1] = 6.0 s
<strong>H<sub>2</sub>O</strong> pulse time: [(0.1 + 0.1) s * 29] + [(0.1 + 0.1) s * 1] = <strong>6.0 s</strong>


The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>).
The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>).


%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%


<b>Recipe: AZO 35T</b>
<b>Recipe: AZO 35T</b>
Line 277: Line 277:
The pulse time for each precursor equals the total pulse time times the number of cycles in each macrocycle.
The pulse time for each precursor equals the total pulse time times the number of cycles in each macrocycle.


DEZ pulse time: (0.1 + 0.1) s * 34 = 6.8 s  
<strong>DEZ</strong> pulse time: (0.1 + 0.1) s * 34 = <strong>6.8 s</strong>


TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s
<strong>TMA</strong> pulse time: (0.1 + 0.1 )s * 1 = <strong>0.2 s</strong>


H<sub>2</sub>O pulse time: [(0.1 + 0.1) s * 34] + [(0.1 + 0.1) s * 1] = 7.0 s
<strong>H<sub>2</sub>O</strong> pulse time: [(0.1 + 0.1) s * 34] + [(0.1 + 0.1) s * 1] = <strong>7.0 s</strong>


The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>).
The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>).

Revision as of 17:12, 16 March 2017

THIS PAGE IS UNDER CONSTRUCTIONUnder construction.png

Et2Zn or Zn(CH3CH2)2 = DEZ (diethylzinc)

Recipe: AZO 20T

Maximum deposition thickness: 100 nm

Temperature: 150 oC - 250 oC

# macrocycles n
# cycles 19 1
Precursor DEZ DEZ H2O H2O TMA TMA H2O H2O
Nitrogen flow 150 sccm 150 sccm 200 sccm 200 sccm 150 sccm 150 sccm 200 sccm 200 sccm
Pulse time 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s
Purge time 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s

How to fill out the process log in LabManager:

The pulse time for each precursor equals the total pulse time times the number of cycles in each macrocycle.

DEZ pulse time: (0.1 + 0.1) s * 19 = 3.8 s

TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s

H2O pulse time: [(0.1 + 0.1) s * 19] + [(0.1 + 0.1) s * 1] = 4.0 s

The number of cycles for each precursor now equals the number of macrocycles (n).

%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%

Recipe: AZO 25T

Maximum deposition thickness: 100 nm

Temperature: 150 oC - 250 oC

# macrocycles n
# cycles 24 1
Precursor DEZ DEZ H2O H2O TMA TMA H2O H2O
Nitrogen flow 150 sccm 150 sccm 200 sccm 200 sccm 150 sccm 150 sccm 200 sccm 200 sccm
Pulse time 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s
Purge time 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s

How to fill out the process log in LabManager:

The pulse time for each precursor equals the total pulse time times the number of cycles in each macrocycle.

DEZ pulse time: (0.1 + 0.1) s * 24 = 4.8 s

TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s

H2O pulse time: [(0.1 + 0.1) s * 24] + [(0.1 + 0.1) s * 1] = 5.0 s

The number of cycles for each precursor now equals the number of macrocycles (n).

%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%

Recipe: AZO 30T

Maximum deposition thickness: 100 nm

Temperature: 150 oC - 250 oC

# macrocycles n
# cycles 29 1
Precursor DEZ DEZ H2O H2O TMA TMA H2O H2O
Nitrogen flow 150 sccm 150 sccm 200 sccm 200 sccm 150 sccm 150 sccm 200 sccm 200 sccm
Pulse time 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s
Purge time 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s

How to fill out the process log in LabManager:

The pulse time for each precursor equals the total pulse time times the number of cycles in each macrocycle.

DEZ pulse time: (0.1 + 0.1) s * 29 = 5.8 s

TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s

H2O pulse time: [(0.1 + 0.1) s * 29] + [(0.1 + 0.1) s * 1] = 6.0 s

The number of cycles for each precursor now equals the number of macrocycles (n).

%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%%

Recipe: AZO 35T

Maximum deposition thickness: 100 nm

Temperature: 150 oC - 250 oC

# macrocycles n
# cycles 34 1
Precursor DEZ DEZ H2O H2O TMA TMA H2O H2O
Nitrogen flow 150 sccm 150 sccm 200 sccm 200 sccm 150 sccm 150 sccm 200 sccm 200 sccm
Pulse time 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s
Purge time 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s

How to fill out the process log in LabManager:

The pulse time for each precursor equals the total pulse time times the number of cycles in each macrocycle.

DEZ pulse time: (0.1 + 0.1) s * 34 = 6.8 s

TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s

H2O pulse time: [(0.1 + 0.1) s * 34] + [(0.1 + 0.1) s * 1] = 7.0 s

The number of cycles for each precursor now equals the number of macrocycles (n).

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