Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AZO deposition using ALD: Difference between revisions

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The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>).
The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>).
<b>Recipe: AZO 25T</b>
<b>Maximum deposition thickness: xx nm</b>
<b>Temperature: x <sup>o</sup>C - xx <sup>o</sup>C</b>
{| border="2" cellspacing="2" cellpadding="9"  align="none"
|-
!# macrocycles
|colspan="8" align="center"|<i>n</i>
|-
!# cycles
|colspan="4" align="center"|25
|colspan="4" align="center"|1
|-
!Precursor
!DEZ
!DEZ
!H<sub>2</sub>O
!H<sub>2</sub>O
!TMA
!TMA
!H<sub>2</sub>O
!H<sub>2</sub>O
|-
!Nitrogen flow
|
|
|200 sccm
|200 sccm
|150 sccm
|150 sccm
|200 sccm
|200 sccm
|-
!Pulse time
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|-
!Purge time
|0.5 s
|20.0 s
|0.5 s
|20.0 s
|0.5 s
|20.0 s
|0.5 s
|20.0 s
|-
|}
<b>How to fill out the process log in LabManager:</b>
The pulse time for each precursor equals the total pulse time times the number of cycles in each macroscycle.
DEZ pulse time: (0.1 + 0.1) s * 25 = 5 s
TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s
H<sub>2</sub>O pulse time: [(0.1 + 0.1) s * 20] + [(0.1 + 0.1) s * 1] = 5.2 s
The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>).
<b>Recipe: AZO 30T</b>
<b>Maximum deposition thickness: xx nm</b>
<b>Temperature: x <sup>o</sup>C - xx <sup>o</sup>C</b>
{| border="2" cellspacing="2" cellpadding="9"  align="none"
|-
!# macrocycles
|colspan="8" align="center"|<i>n</i>
|-
!# cycles
|colspan="4" align="center"|30
|colspan="4" align="center"|1
|-
!Precursor
!DEZ
!DEZ
!H<sub>2</sub>O
!H<sub>2</sub>O
!TMA
!TMA
!H<sub>2</sub>O
!H<sub>2</sub>O
|-
!Nitrogen flow
|
|
|200 sccm
|200 sccm
|150 sccm
|150 sccm
|200 sccm
|200 sccm
|-
!Pulse time
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|-
!Purge time
|0.5 s
|20.0 s
|0.5 s
|20.0 s
|0.5 s
|20.0 s
|0.5 s
|20.0 s
|-
|}
<b>Recipe: AZO 35T</b>
<b>Maximum deposition thickness: xx nm</b>
<b>Temperature: x <sup>o</sup>C - xx <sup>o</sup>C</b>
{| border="2" cellspacing="2" cellpadding="9"  align="none"
|-
!# macrocycles
|colspan="8" align="center"|<i>n</i>
|-
!# cycles
|colspan="4" align="center"|35
|colspan="4" align="center"|1
|-
!Precursor
!DEZ
!DEZ
!H<sub>2</sub>O
!H<sub>2</sub>O
!TMA
!TMA
!H<sub>2</sub>O
!H<sub>2</sub>O
|-
!Nitrogen flow
|
|
|200 sccm
|200 sccm
|150 sccm
|150 sccm
|200 sccm
|200 sccm
|-
!Pulse time
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|0.1 s
|-
!Purge time
|0.5 s
|20.0 s
|0.5 s
|20.0 s
|0.5 s
|20.0 s
|0.5 s
|20.0 s
|-
|}

Revision as of 09:43, 10 January 2017

THIS PAGE IS UNDER CONSTRUCTIONUnder construction.png

EtZn2O = DEZ

Recipe: AZO 20T

Maximum deposition thickness: xx nm

Temperature: x oC - xx oC

# macrocycles n
# cycles 20 1
Precursor DEZ DEZ H2O H2O TMA TMA H2O H2O
Nitrogen flow 200 sccm 200 sccm 150 sccm 150 sccm 200 sccm 200 sccm
Pulse time 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s
Purge time 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s


How to fill out the process log in LabManager:

The pulse time for each precursor equals the total pulse time times the number of cycles in each macroscycle.

DEZ pulse time: (0.1 + 0.1) s * 20 = 4 s

TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s

H2O pulse time: [(0.1 + 0.1) s * 20] + [(0.1 + 0.1) s * 1] = 4.2 s

The number of cycles for each precursor now equals the number of macrocycles (n).


Recipe: AZO 25T

Maximum deposition thickness: xx nm

Temperature: x oC - xx oC

# macrocycles n
# cycles 25 1
Precursor DEZ DEZ H2O H2O TMA TMA H2O H2O
Nitrogen flow 200 sccm 200 sccm 150 sccm 150 sccm 200 sccm 200 sccm
Pulse time 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s
Purge time 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s


How to fill out the process log in LabManager:

The pulse time for each precursor equals the total pulse time times the number of cycles in each macroscycle.

DEZ pulse time: (0.1 + 0.1) s * 25 = 5 s

TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s

H2O pulse time: [(0.1 + 0.1) s * 20] + [(0.1 + 0.1) s * 1] = 5.2 s

The number of cycles for each precursor now equals the number of macrocycles (n).


Recipe: AZO 30T

Maximum deposition thickness: xx nm

Temperature: x oC - xx oC

# macrocycles n
# cycles 30 1
Precursor DEZ DEZ H2O H2O TMA TMA H2O H2O
Nitrogen flow 200 sccm 200 sccm 150 sccm 150 sccm 200 sccm 200 sccm
Pulse time 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s
Purge time 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s


Recipe: AZO 35T

Maximum deposition thickness: xx nm

Temperature: x oC - xx oC

# macrocycles n
# cycles 35 1
Precursor DEZ DEZ H2O H2O TMA TMA H2O H2O
Nitrogen flow 200 sccm 200 sccm 150 sccm 150 sccm 200 sccm 200 sccm
Pulse time 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s
Purge time 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s
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