Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AZO deposition using ALD: Difference between revisions

From LabAdviser
Jump to navigation Jump to search
No edit summary
Line 12: Line 12:
|-  
|-  
!# macrocycles
!# macrocycles
|colspan="8" align="center"|1
|colspan="8" align="center"|<i>n</i>
|-  
|-  
!# cycles
!# cycles
Line 66: Line 66:


DEZ pulse time: (0.1 + 0.1) s * 20 = 4 s  
DEZ pulse time: (0.1 + 0.1) s * 20 = 4 s  
TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s
TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s
H<sub>2</sub>O pulse time: [(0.1 + 0.1) s * 20] + [ (0.1 + 0.1) s * 1] 4.2 s
 
H<sub>2</sub>O pulse time: [(0.1 + 0.1) s * 20] + [(0.1 + 0.1) s * 1] = 4.2 s
 
The number of cycles for each precursor now equals the number of macrocycles (<i>n</i>).

Revision as of 17:34, 9 January 2017

THIS PAGE IS UNDER CONSTRUCTIONUnder construction.png

EtZn2O = DEZ

Recipe: AZO 20T

Maximum deposition thickness: xx nm

Temperature: x oC - xx oC

# macrocycles n
# cycles 20 1
Precursor DEZ DEZ H2O H2O TMA TMA H2O H2O
Nitrogen flow 200 sccm 200 sccm 150 sccm 150 sccm 200 sccm 200 sccm
Pulse time 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s
Purge time 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s


How to fill out the process log in LabManager:

The pulse time for each precursor equals the total pulse time times the number of cycles in each macroscycle.

DEZ pulse time: (0.1 + 0.1) s * 20 = 4 s

TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s

H2O pulse time: [(0.1 + 0.1) s * 20] + [(0.1 + 0.1) s * 1] = 4.2 s

The number of cycles for each precursor now equals the number of macrocycles (n).

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/AZO_deposition_using_ALD&oldid=25190"