Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AZO deposition using ALD: Difference between revisions

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=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=


EtZn<sub>2</sub>O = DEZ
<b>Recipe: AZO 20T</b>
<b>Maximum deposition thickness: xx nm</b>
<b>Temperature: x <sup>o</sup>C - xx <sup>o</sup>C</b>


{| border="2" cellspacing="2" cellpadding="9"  align="none"
{| border="2" cellspacing="2" cellpadding="9"  align="none"
|-  
|-  
|
!# macrocycles
!EtZn<sub>2</sub>O
|colspan="8" align="center"|1
!EtZn<sub>2</sub>O
|-
!# cycles
|colspan="4" align="center"|20
|colspan="4" align="center"|1
|-
!Precursor
!DEZ
!DEZ
!H<sub>2</sub>O
!H<sub>2</sub>O
!H<sub>2</sub>O
!H<sub>2</sub>O
Line 44: Line 58:
|20.0 s
|20.0 s
|-
|-
!# cycles
|colspan="4" align="center"|20
|colspan="4" align="center"|1
|}
|}
<b>How to fill out the process log in LabManager:</b>
The pulse time for each precursor equals the total pulse time times the number of cycles in each macroscycle.
DEZ pulse time: (0.1 + 0.1) s * 20 = 4 s
TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s
H<sub>2</sub>O pulse time: [(0.1 + 0.1) s * 20] + [ (0.1 + 0.1) s * 1] 4.2 s

Revision as of 17:30, 9 January 2017

THIS PAGE IS UNDER CONSTRUCTIONUnder construction.png

EtZn2O = DEZ

Recipe: AZO 20T

Maximum deposition thickness: xx nm

Temperature: x oC - xx oC

# macrocycles 1
# cycles 20 1
Precursor DEZ DEZ H2O H2O TMA TMA H2O H2O
Nitrogen flow 200 sccm 200 sccm 150 sccm 150 sccm 200 sccm 200 sccm
Pulse time 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s 0.1 s
Purge time 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s 0.5 s 20.0 s


How to fill out the process log in LabManager:

The pulse time for each precursor equals the total pulse time times the number of cycles in each macroscycle.

DEZ pulse time: (0.1 + 0.1) s * 20 = 4 s TMA pulse time: (0.1 + 0.1 )s * 1 = 0.2 s H2O pulse time: [(0.1 + 0.1) s * 20] + [ (0.1 + 0.1) s * 1] 4.2 s

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