Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions
Jump to navigation
Jump to search
No edit summary |
No edit summary |
||
| Line 31: | Line 31: | ||
|- | |- | ||
! Isoslow7 <!-- recipe name --> | ! Isoslow7 <!-- recipe name --> | ||
| | | - <!-- step --> | ||
| 10 <!-- chiller temp --> | | 10 <!-- chiller temp --> | ||
| 10 <!-- pressure --> | | 10 <!-- pressure --> | ||
| | | 0 <!-- C4F8 flow --> | ||
| 80 <!-- SF6 flow --> | | 80 <!-- SF6 flow --> | ||
| | | 0 <!-- O2 flow --> | ||
| 0 <!-- Ar flow --> | |||
| 150 <!-- coil power --> | | 150 <!-- coil power --> | ||
| 3 <!-- platen power --> | | 3 <!-- platen power --> | ||
| Line 49: | Line 50: | ||
| <!-- SF6 flow --> | | <!-- SF6 flow --> | ||
| <!-- O2 flow --> | | <!-- O2 flow --> | ||
| <!-- Ar flow --> | |||
| <!-- coil power --> | | <!-- coil power --> | ||
| <!-- platen power --> | | <!-- platen power --> | ||