Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions

Revision as of 10:02, 24 June 2016

**Mediumiso**
Recipe	Step	Temperature	Pressure	C₄F₈	SF₆	O₂	Ar	Coil	Platen	Runs	Key words
mediumiso1	-	20	25	0	150	0	0	600	3	1	NA
Isoslow7		10	10		80		150	3	1
-

@@ Line 29: / Line 29: @@
 |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1|1]]     <!-- link processes -->
 | NA     <!-- keywords -->
+|-
+! Isoslow7       <!-- recipe name -->
+|        <!-- step -->
+| 10        <!-- chiller temp -->
+| 10       <!-- pressure -->
+|        <!-- C4F8 flow -->
+| 80       <!-- SF6 flow -->
+|        <!-- O2 flow -->
+| 150       <!-- coil power -->
+| 3       <!-- platen power -->
+|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/Isoslow7|1]]         <!-- link processes -->
+|        <!-- keywords -->
 |-
 ! -       <!-- recipe name -->
@@ Line 42: / Line 54: @@
 |        <!-- keywords -->
 |-
 |}