Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions
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! width="50"| Temperature | ! width="50"| Temperature | ||
! width="50"| Pressure | ! width="50"| Pressure | ||
! width="50"| C<sub>4</sub>F<sub>8</sub> | ! width="50"| C<sub>4</sub>F<sub>8</sub> | ||
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| 20 <!-- chiller temp --> | | 20 <!-- chiller temp --> | ||
| 25 <!-- pressure --> | | 25 <!-- pressure --> | ||
| 0 <!-- C4F8 flow --> | | 0 <!-- C4F8 flow --> | ||
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| <!-- chiller temp --> | | <!-- chiller temp --> | ||
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| <!-- C4F8 flow --> | | <!-- C4F8 flow --> | ||
Revision as of 09:59, 24 June 2016
| Recipe | Step | Temperature | Pressure | C4F8 | SF6 | O2 | Ar | Coil | Platen | Runs | Key words |
|---|---|---|---|---|---|---|---|---|---|---|---|
| mediumiso1 | - | 20 | 25 | 0 | 150 | 0 | 0 | 600 | 3 | 1 | NA |
| - |