Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions
Jump to navigation
Jump to search
No edit summary |
No edit summary |
||
| Line 29: | Line 29: | ||
| 600 <!-- coil power --> | | 600 <!-- coil power --> | ||
| 3 <!-- platen power --> | | 3 <!-- platen power --> | ||
| [[ | |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic/mediumiso1|1]] <!-- link processes --> | ||
| NA <!-- keywords --> | | NA <!-- keywords --> | ||
|- | |- | ||
Revision as of 13:01, 6 June 2016
| Recipe | Step | Temperature | Time | Pressure | C4F8 | SF6 | O2 | Ar | Coil | Platen | Runs | Key words |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| mediumiso1 | - | 20 | NA | 25 | 0 | 150 | 0 | 0 | 600 | 3 | 1 | NA |
| - |