Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions

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{| border="1" cellpadding="1" cellspacing="0" style="text-align:center;"
|+ '''Mediumiso'''
|-
! rowspan="2" width="100"| Recipe
! rowspan="2" width="20"| Step
! rowspan="2" width="20"| Temp.
! colspan="6" | Deposition step
! colspan="7" | Etch step
! colspan="3" | Process observations
|-
! Time
! Pres.
! C<sub>4</sub>F<sub>8</sub>
! SF<sub>6</sub>
! O<sub>2</sub>
! Coil
! Time
! Pres.
! C<sub>4</sub>F<sub>8</sub>
! SF<sub>6</sub>
! O<sub>2</sub>
! Coil
| [[Main Page/Process Logs/jmli/Parameters#Platen power|Platen]]
| [[Main Page/Process Logs/jmli/Parameters#Hardware | HW]]
! Runs
! width="100" | Key words
|-
! mediumiso1    <!-- recipe name -->
| -      <!-- step -->
| 20      <!-- chiller temp -->
| NA      <!-- dep time -->
| NA      <!-- dep pressure -->
| NA      <!-- C4F8 flow -->
| NA      <!-- SF6 flow -->
| NA    <!-- O2 flow -->
| NA      <!-- coil power -->
| NA      <!-- etch time -->
| 25      <!-- etch pressure -->
| 0      <!-- C4F8 flow -->
| 150      <!-- SF6 flow -->
| 0      <!-- O2 flow -->
| 600      <!-- coil power -->
| 3      <!-- platen power -->
| -      <!-- hardware setting -->
| [[Main Page/Process Logs/jmli/Pegasus/isotropic/mediumiso1 | 1]]      <!-- link processes -->
| NA    <!-- keywords -->
|-
! -  <!-- recipe name -->
|        <!-- step -->
|        <!-- chiller temp -->
|        <!-- dep time -->
|        <!-- dep pressure -->
|        <!-- C4F8 flow -->
|        <!-- SF6 flow -->
|        <!-- O2 flow -->
|        <!-- coil power -->
|        <!-- etch time -->
|        <!-- etch pressure -->
|        <!-- C4F8 flow -->
|        <!-- SF6 flow -->
|        <!-- O2 flow -->
|        <!-- coil power -->
|        <!-- platen power -->
|        <!-- hardware setting -->
|      <!-- link processes -->
|      <!-- keywords -->
|-
|}




Revision as of 12:45, 6 June 2016


Mediumiso
Recipe Step Temperature Time Pressure C4F8 SF6 O2 Ar Coil Platen Runs Key words
mediumiso1 - 20 NA 25 0 150 0 0 600 3 1 NA
-
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