Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic: Difference between revisions
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(Created page with "{| border="1" cellpadding="1" cellspacing="0" style="text-align:center;" |+ '''Mediumiso''' |- ! rowspan="2" width="100"| Recipe ! rowspan="2" width="20"| Step ! rowspan="2" w...") |
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{| border="1" cellpadding="1" cellspacing="0" style="text-align:center;" | |||
|+ '''Mediumiso''' | |||
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! width="50"| Recipe | |||
! width="50"| Step | |||
! width="50"| Temperature | |||
! width="50"| Time | |||
! width="50"| Pressure | |||
! width="50"| C<sub>4</sub>F<sub>8</sub> | |||
! width="50"| SF<sub>6</sub> | |||
! width="50"| O<sub>2</sub> | |||
! width="50"| Ar | |||
! width="50"| Coil | |||
! width="50"| Platen | |||
! colspan="2" | Process observations | |||
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! Runs | |||
! width="100" | Key words | |||
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! mediumiso1 <!-- recipe name --> | |||
| - <!-- step --> | |||
| 20 <!-- chiller temp --> | |||
| NA <!-- time --> | |||
| 25 <!-- pressure --> | |||
| 0 <!-- C4F8 flow --> | |||
| 150 <!-- SF6 flow --> | |||
| 0 <!-- O2 flow --> | |||
| 600 <!-- coil power --> | |||
| 3 <!-- platen power --> | |||
| [[Main Page/Process Logs/jmli/Pegasus/isotropic/mediumiso1 | 1]] <!-- link processes --> | |||
| NA <!-- keywords --> | |||
|- | |||
! <!-- recipe name --> | |||
| <!-- step --> | |||
| <!-- chiller temp --> | |||
| <!-- time --> | |||
| <!-- pressure --> | |||
| <!-- C4F8 flow --> | |||
| <!-- SF6 flow --> | |||
| <!-- O2 flow --> | |||
| <!-- coil power --> | |||
| <!-- platen power --> | |||
| <!-- link processes --> | |||
| <!-- keywords --> | |||
|- | |- | ||
|} | |} | ||
Revision as of 13:48, 3 June 2016
| Recipe | Step | Temp. | Deposition step | Etch step | Process observations | |||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Time | Pres. | C4F8 | SF6 | O2 | Coil | Time | Pres. | C4F8 | SF6 | O2 | Coil | Platen | HW | Runs | Key words | |||
| mediumiso1 | - | 20 | NA | NA | NA | NA | NA | NA | NA | 25 | 0 | 150 | 0 | 600 | 3 | - | 1 | NA |
| - | ||||||||||||||||||
| Recipe | Step | Temperature | Time | Pressure | C4F8 | SF6 | O2 | Ar | Coil | Platen | Process observations | |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Runs | Key words | |||||||||||
| mediumiso1 | - | 20 | NA | 25 | 0 | 150 | 0 | 600 | 3 | 1 | NA | |