Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/nanoetch/180nmzep: Difference between revisions

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Revision as of 16:24, 3 February 2016

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  • The profiles of the 180 nm zep resist

  • The 30 nm zep profile

  • The 60 nm zep profile

  • The 90 nm zep profile

  • The 120 nm zep profile

  • The 150 nm zep profile

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