Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using AOE/Standard recipe with resist mask/SiO2 etch with DUV mask: Difference between revisions
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Revision as of 08:48, 25 November 2015
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- Etch of Thermal silicon oxide with DUV KRF resist as mask. Made by BGHE February 2015