May 2014 Survey

Survey introduction

The May 2014 survey was the 11th survey carried out using a format where individual cleanroom users were asked about their view on various parts of using DTU Danchip's facilities and in particular the cleanroom facilities.
The questionaire was send to 290 registered users (based on the logging of cleanroom use) unfortunately 10 of the e-mail adresses was obsolete and thus the mails bounced, which brought the total number of potential answers to 280 . In total 56 persons answered the questionaire which means an answer fraction of 19% regardless of whether or not the bounces should be included in the total.
This page deals with the comments given as part of the questionaire. Danchip values this feedback highly.

Comments

The comments appear here as they were written in the feedback field of the questionaire. In a few cases they have been anonymized or the worst spelling mistakes corrected.

Comment 1

I might have been unlucky but last week lesker system was an hell. Also, is becoming a bottleneck since booking is done with 2-3 weeks advance.

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Comment 2

It is really difficult to give meaningful satisfaction points for such overall statements. For example, I think the availability and performance of optical microscopes are absolute crap, whereas the availability and performance of Electron Microscopes are quite good. Unfortunately, I use optical microscopes more than I use electron microscopes.

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Comment 3

When a problem arises within the cleanroom, the chances are low to be able to get in contact with the responsible personnel by calling on the phone. When the staff are found/present, they are otherwise very helpful. Could be very helpful to know where staff are (both within and outside the cleanroom) and/or if they are at Danchip that day.

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Comment 4

I have two points to make: 1) A good photo-studio setup for taking images of wafers in the cleanroom would be highly appreciated. 2) It is not on your list, but Labmanager is from a user perspective not optimal. .

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Comment 5

Countinuous problems and non availability of e-beam machine. Due to the countinuous problems one loses the priority since the machine is quite booked and there is no other way to expose in the weekend if one needs to load the sample just a few hours before the exposure. Still some issues with wild booking and cancellation for SEM ZeissCountinuous problems and non availability of e-beam machine. Due to the countinuous problems one loses the priority since the machine is quite booked and there is no other way to expose in the weekend if one needs to load the sample just a few hours before the exposure. Still some issues with wild booking and cancellation for SEM Zeiss.

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Comment 6

Some equipment is heavily booked.The manual spinner is not completely horisontal, but I don't think that is changeable.

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Comment 7

Many of the machine down-times have been poorly described and especially expected ready dates have been wrong. It is not Danchip's fault if a machine fails, but, as a user, I would prefer that the expected ready dates were more reliable.

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Comment 8

Implement a function in labmanager, to minimize the amount of status mail to users in the cleanroom. Make a function available, so the user can write user status and changes (such as "I'm done with the machine early") directly in labmanager. The mail pressure and number of mail that do not concern the far amount of user, is too large! :-).

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Comment 9

It would be better if the email elert can be catologized. I mean, the reader can easily know whom the emails come from, for example, the customers or technicians. In that way, we can judge the importance and priority of the email before we find time to read them.

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Comment 10

In general there has been a period now with issues with EBL, DUV and etching tools which is what we are using the most at Danchip. Thus, we hope that this will soon be improved so we easier can coordinate our work. The instabilities also results in extra work for Danchip staff since we sometimes asks for equipment changed to 6 inch mode which when it then runs 6 inch mode we cannot use it anyway because other equipment (typically EBL and DUV) is not working correctly.

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Comment 11

Could the Status Change emails for machines in the clean room be changed, so you only receive mails for machines that you have training in, as the amount of Status Changes emails sometimes makes me think about it as spam.

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Comment 12

The atmosphere at the CR is really nice. I love CR staff, they are very friendly. I wish I could stay here longer!.

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Comment 13

It would be very nice to have a bonding tool which could perform repeatedly precise alignment (x < 1 µm).

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Comment 14

"Performance of equipment" er overordnet set "satisfied", men ved enkelt tilfælde er det "Unsatisfied". Derfor besvarelsen.

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Comment 15

In our cleanroom, many machines have been dedicated to certain type of materials, which is a good idea for the machine maintaining. However, we are doing research and very often develop new process which may contain two or more different materials. Sometimes, such new process is almost forbidden everywhere, because each material might be limited to a certain machine and their combination turns out to no where. We've tried to negotiate with danchip and it seems that there is no good way to solve it easily. We totally understand that it is also difficult and really depends on case to case. But hopefully, danchip can improve it in some way, so users can have more flexibility to develop new process.

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Comment 16

The down time of the PECVD2 is a major disappointment for me. It's been over 2-3 months to get it back to normal use. Also, with normal status of the machine, I found many problems with the film thickness variation from run-to-run. Responsible person was on vacation for a week and there's nobody who could fix the machine. Despite all that, I frequently had to solve minor problems with the machine all the time e.g. communication failure, fail to pump down, sliding of the sample on the carrier etc. I'm aware that the machine is old, but having the user solve the problem all the time is also not very good. Other than that I'm fully satisfied with the service.

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Comment 17

Jeg vil foreslå at lave logbøgerne som en inkorporeret del af labmanager - jeg ved der allerede er forsøg med et sådan system på "sputter system lesker" men jeg synes ikke implementeringen er særligt god. I den nuværende form er logbøgerne sat op på en måde så de er designet til at hjælpe Danchip - ikke brugerne af maskinerne. Hvis det modsatte var tilfælde ville logbøgerne blive bedre udfyldt. Det er f.eks. meget svært at finde sine egne linjer i loggen på tværs af maskiner. jeg bruger selv en løsning udviklet af m-team her på dtu og jeg vil foreslå at finde inspiration til et logbogs system derfra.

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