Specific Process Knowledge: Difference between revisions

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|[[Specific Process Knowledge/Thermal Process/Oxidation| Thermal Oxide growth]]
|[[Specific Process Knowledge/Thermal Process/Oxidation| Thermal Oxide growth]]
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|Furnaces
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|SiO2
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|[[Specific Process Knowledge/Thin film deposition| Thin film deposition]]
|[[Specific Process Knowledge/Thin film deposition| Thin film deposition]]
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|Sputter deposition
|Sputter deposition
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|Si,SiO2,Si3N3,TiO2, metals
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|Thermal deposition
|Thermal evaporation
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|Al, ?
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|-
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|E-beam evaporation
|E-beam evaporation
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|Metals
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|-
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|LPCVD
|LPCVD
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|Si3N4, SRN, SiO2, Si (poly and amorph)
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|-
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|PECVD
|PECVD
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|Si3N4, SiO2, PBSG
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|Electroplating
|Electroplating
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|Ni
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|[[Specific Process Knowledge/Lithography/Coaters|Coating]]
|[[Specific Process Knowledge/Lithography/Coaters|Coating]]
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|Spin coating
|Spin coating
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|resists, polymers
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|Spray coating
|Spray coating
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|resists, polymers
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|Epitaxial growth
|Epitaxial growth
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|MOCVD
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|?
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Revision as of 14:10, 12 June 2014

2nd Level - Process Topic

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Choose the process topic you are interested in

The section below here is under construction Section under construction.jpg

Overview of sample processing

Clean the sample Cleaning.jpg
Drying Samples Drying.jpg
Thermal treatment of the sample Thermal treatment 1.jpg
Bonding samples together
Characterize the sample

Overview of sample processing 2

Clean the sample
Drying Samples
Thermal treatment of the sample
Bonding samples together
Characterize the sample

Overview of sample processing 3

Clean your sample
Drying your Samples
Thermal treatment of your sample
Bonding your samples together
Characterize your sample