Specific Process Knowledge: Difference between revisions
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2nd Level - Process Topic
The section below here is under construction
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==Overview of sample processing 2== | ==Overview of sample processing 2== | ||
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! [[image:cleaning.jpg|thumb|150px|Clean the sample]] | ! [[image:cleaning.jpg|thumb|150px|Clean the sample]] | ||
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! [[image:drying.jpg|thumb|150px|Drying Samples ]] | ! [[image:drying.jpg|thumb|150px|Drying Samples ]] | ||
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! [[image:Making a layer 1.jpg|thumb|140px|Film Formation ]] | ! [[image:Making a layer 1.jpg|thumb|140px|Film Formation ]] | ||
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! | ! [[image:Thermal treatment 1.jpg|thumb|150px|Thermal treatment of the sample ]] | ||
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! | ! [[image:Making a mask 1.jpg|thumb|140px|Make a mask on the sample ]] | ||
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|Lithography | |Lithography | ||
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! Transfer pattern into the sample | ! Transfer pattern into the sample | ||
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! Direct structure definition | ! Direct structure definition | ||
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! Bonding samples together | ! Bonding samples together | ||
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! Characterize the sample | ! Characterize the sample | ||
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! Back end of the sample | ! Back end of the sample | ||
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|Dicing | |Dicing | ||
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Revision as of 09:27, 12 June 2014
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Choose the process topic you are interested in
The section below here is under construction 
Overview of sample processing
Clean the sample 
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Drying Samples 
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Make a layer on the sample or Film Formation 
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| Thermal Oxide growth | |
| Thin Film deposition | |
| Sputter deposition | |
| Thermal deposition | |
| E-beam evaporation | |
| CVD | |
| LPCVD | |
| PECVD | |
| Coating | |
| Spin coating | |
| Spray coating | |
| Electroplating | |
| Epitaxial growth |
Thermal treatment of the sample 
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Make a mask on the sample 
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| Lithography |
| Imprinting |
| Transfer pattern into the sample |
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| Wet etch |
| Dry etch |
| Lift-off |
| Direct structure definition |
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| Imprinting |
| LASER machining |
| Lithographic definition |
| Polymer Injection molding |
| Bonding samples together |
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| Characterize the sample |
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| Back end of the sample |
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| Chip/die mounting |
| Wire bonding |
| Dicing |
Overview of sample processing 2
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