Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions
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4th Level - Comparison
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
! Batch size | |||
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*Up to 1x4" wafers | *Up to 1x4" wafers | ||
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|- | |- | ||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
! Pre-clean | |||
|RF Ar clean | |RF Ar clean | ||
|RF Ar clean | |RF Ar clean | ||
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| | | | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
! Layer thickness | |||
|10 Å to 5000Å* | |10 Å to 5000Å* | ||
|10 Å to 5000Å* | |10 Å to 5000Å* | ||
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
! Deposition rate | |||
|2 Å/s to 10 Å/s | |2 Å/s to 10 Å/s | ||
|1 Å/s to 10 Å/s | |1 Å/s to 10 Å/s | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
! Comment | |||
|For thicknesses above 200 nm | |For thicknesses above 200 nm | ||
permission is required | permission is required | ||
Revision as of 17:02, 6 March 2014
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Gold can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment.
| E-beam evaporation (Alcatel) | E-beam evaporation (Wordentec) | Sputter (Lesker) | Sputter coater Hummer | Sputter coater Balzer | |
|---|---|---|---|---|---|
| Batch size |
|
|
|
|
|
| Pre-clean | RF Ar clean | RF Ar clean | RF Ar clean | ||
| Layer thickness | 10 Å to 5000Å* | 10 Å to 5000Å* | 10 Å to | ||
| Deposition rate | 2 Å/s to 10 Å/s | 1 Å/s to 10 Å/s | Not measured | Not measured | |
| Comment | For thicknesses above 200 nm
permission is required |
For thicknesses above 200 nm
permission is required |
Used to gold sputter coating of
samples mainly before SEM characterization |
Used to gold sputter coating of
samples mainly before SEM characterization |
* For thicknesses above 200 nm permission from ThinFilm group (thinfilm@danchip.dtu.dk) is required.
Adhesion of Au on Si
Studies of Au deposition processes
Roughness of Au layers - Roughness of Au layers deposited with different equipment and settings